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At the same time, perfluorocarbons such as tetrafluoromethane (CF₄) in particular pose one of the greatest challenges to the industry’s carbon footprint due to their very high global warming potential.",[],"grey_large",{"text":295,"textStyle":315},{"value":296,"links":314},{"schema":232,"document":297},{"type":234,"children":298},[299,303,307,310],{"type":237,"children":300},[301],{"type":240,"value":302},"The manufacture of photomasks – one of the key production inputs in semiconductor manufacturing – also generates process waste gases that must be treated. With the successful commissioning of the plasma-wet systems from DAS Environmental Experts, AMTC is systematically transitioning waste gas treatment in mask production to an electric and sustainable technology. 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High-performance waste gas treatment is thus evolving from a necessary component of the production process into a strategic lever for decarbonisation.",{"type":237,"children":308},[309],{"type":240,"value":94},{"type":237,"children":311},[312],{"type":240,"value":313},"By switching to STYRAX Plasma-Wet systems, which are powered by 100 per cent renewable electricity, AMTC is reducing its use of natural gas – and the associated CO₂ emissions – by a further 21 per cent relative to total emissions in 2026. In addition, the oxygen – which is extracted at great expense from the ambient air and would be required for combustion – is no longer needed, making its delivery unnecessary and thus saving additional CO₂ emissions from road transport.",[],"standard",{"type":317,"id":318,"anchor":94,"background":263,"testimonial":319},"TestimonialBlockRecord","U74KHEyeTyiG1dcTxg4jgw",[320],{"id":321,"quote":322,"media":331,"nameContactPerson":344,"nameCompany":345},"bLq2GT3rRmurnSm1InzQXQ",{"value":323,"links":330},{"schema":232,"document":324},{"type":234,"children":325},[326],{"type":237,"children":327},[328],{"type":240,"value":329},"“With the successful commissioning, we have taken another important step towards climate-friendly photomask production. Environmental sustainability is not achieved solely in the cleanroom, but equally in a factory’s technical infrastructure. 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