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Indem Sie auf „Alle Cookies akzeptieren“ klicken, stimmen Sie der Speicherung von Cookies auf Ihrem Gerät und der damit verbundenen Datenverarbeitung zu. So können wir die Website-Navigation verbessern, die Website-Nutzung analysieren und unsere Inhalte weiterentwickeln. Sie können Ihre Einwilligung jederzeit über die Schaltfläche „Einstellungen verwalten“ in unserer Cookie Mitteilung widerrufen.","Konfigurieren","Ich lehne ab","Ich stimme zu","Auswahl speichern","Alles akzeptieren","1",[87,96,103],{"key":88,"name":89,"description":90,"function":91,"cookie":95},"marketing","Marketing","Diese Dienste erkennen, aus welchen Unternehmen Besucher auf unsere Website kommen, damit unser Vertrieb Interessenten gezielt ansprechen kann. Eingesetzt wird dafür SalesViewer®; die Erkennung erfolgt unternehmensbezogen. Ohne Ihre Einwilligung wird der Dienst nicht geladen. Einzelheiten finden Sie in unserer Datenschutzerklärung.",[92],{"kind":93,"params":94},"GTagManager","",[],{"key":97,"name":98,"description":99,"function":100,"cookie":102},"anonymised_statistics","Anonymisierte Statistik","Mit anonymisierten Statistiken messen wir, wie die Website genutzt wird, um sie zu verbessern. Eingesetzt wird dafür Matomo; die Daten werden nicht mit einzelnen Personen verknüpft. Ohne Ihre Einwilligung wird nichts gemessen.",[101],{"kind":93,"params":94},[],{"key":104,"name":105,"description":106,"function":107,"cookie":109},"essential_functions","Essentielle Funktionen","Dazu gehören wichtige Funktionen wie die Seitennavigation und die Suche nach Produkten. 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Ltd.",{"_allSlugLocales":162},[163],{"locale":148,"value":157},{"name":165,"code":166,"department":167},"English US","en_US",[168],{"id":7,"name":169,"languageSwitchTarget":8},"DAS Environmental Expert USA Inc.",["Reactive",171],{"_site":172},{"globalSeo":173,"noIndex":176},{"siteName":117,"titleSuffix":174,"facebookPageUrl":94,"fallbackSeo":175}," | DAS EE",{"description":117,"noIndex":176,"title":117,"twitterCard":177,"image":178},false,"summary_large_image",{"url":179},"https://www.datocms-assets.com/159774/1787296666-das-logo-og-graph.jpg",["Reactive",181],{"_site":182},{"globalSeo":183,"noIndex":176},{"siteName":117,"titleSuffix":174,"facebookPageUrl":94,"fallbackSeo":184},{"description":117,"noIndex":176,"title":117,"twitterCard":177,"image":185},{"url":179},["Reactive",187],{"_site":188},{"globalSeo":189,"noIndex":176},{"siteName":117,"titleSuffix":174,"facebookPageUrl":94,"fallbackSeo":190},{"description":117,"noIndex":176,"title":117,"twitterCard":177,"image":191},{"url":179},["Reactive",193],{"_site":194},{"globalSeo":195,"noIndex":176},{"siteName":117,"titleSuffix":174,"facebookPageUrl":94,"fallbackSeo":196},{"description":117,"noIndex":176,"title":117,"twitterCard":177,"image":197},{"url":179},["Reactive",199],{"_site":200},{"globalSeo":201,"noIndex":176},{"siteName":117,"titleSuffix":174,"facebookPageUrl":94,"fallbackSeo":202},{"description":117,"noIndex":176,"title":117,"twitterCard":177,"image":203},{"url":179},["Reactive",205],{"_site":206},{"globalSeo":207,"noIndex":176},{"siteName":117,"titleSuffix":208,"facebookPageUrl":94,"fallbackSeo":209}," | DAS",{"description":117,"noIndex":176,"title":117,"twitterCard":177,"image":210},{"url":179},["Reactive",212],{"_site":213},{"globalSeo":214,"noIndex":176},{"siteName":117,"titleSuffix":174,"facebookPageUrl":94,"fallbackSeo":215},{"description":117,"noIndex":176,"title":117,"twitterCard":177,"image":216},{"url":179},{"news":218},{"id":219,"name":220,"publicationDate":221,"updatedAt":222,"author":8,"articleCategory":223,"summary":225,"slug":259,"content":260},"Z_3W383ZTvWTmSSZw1jM9Q","AMTC and DAS Environmental Experts Reach Milestone in Photomask Manufacturing","2026-10-28","2026-10-26T09:28:34+01:00",{"name":224},"BUG",[226],{"headline":227,"linkLabel":228,"tagline":229,"structuredText":230,"image":243},"AMTC und DAS Environmental Experts erreichen Meilenstein für klimafreundlichere Photomaskenfertigung","Pressemitteilung","Pressmitteilung",{"links":231,"value":232},[],{"schema":233,"document":234},"dast",{"type":235,"children":236},"root",[237],{"type":238,"children":239},"paragraph",[240],{"type":241,"value":242},"span","Das Advanced Mask Technology Center Dresden (AMTC) und DAS Environmental Experts haben einen wichtigen Meilenstein ihrer gemeinsamen Nachhaltigkeitsinitiative erreicht. Nach erfolgreicher Installation und Inbetriebnahme aller STYRAX Plasma-Wet-Anlagen verfügt das AMTC nun über eine modernisierte Abgasbehandlung für wesentliche Bereiche der Photomaskenfertigung. Damit bringen die Partner die Dekarbonisierung eines zentralen Abschnitts der Halbleiter-Wertschöpfungskette in die industrielle Praxis.",{"type":244,"alt":245,"id":246,"title":247,"url":248,"focalPoint":249,"responsiveImage":251},"AltTitleFileField","Eine große Industriemaschine mit der Aufschrift „DAS STYRAX Inline“ steht in einer Industrieumgebung und verfügt über ein zentrales Bedienfeld mit einer digitalen Anzeige sowie verschiedene angeschlossene Schläuche und Kabel, was sie als Beispiel für moderne Industrieanlagen veranschaulicht.","aX6vqAEYQ92wcDFcSPSHZw","DAS STYRAX Plasma-Wet System in AMTC-Subfab","https://www.datocms-assets.com/159774/1793002584-styrax-inline-industrial-control-cabinet.png",{"x":250,"y":250},0.5,{"src":252,"srcSet":253,"width":254,"height":255,"aspectRatio":256,"alt":245,"title":247,"base64":257,"sizes":258,"webpSrcSet":253},"https://www.datocms-assets.com/159774/1793002584-styrax-inline-industrial-control-cabinet.png?fit=max&fm=webp&q=50&w=960","https://www.datocms-assets.com/159774/1793002584-styrax-inline-industrial-control-cabinet.png?dpr=0.25&fit=max&fm=webp&q=50&w=960 240w,https://www.datocms-assets.com/159774/1793002584-styrax-inline-industrial-control-cabinet.png?dpr=0.5&fit=max&fm=webp&q=50&w=960 480w,https://www.datocms-assets.com/159774/1793002584-styrax-inline-industrial-control-cabinet.png?dpr=0.75&fit=max&fm=webp&q=50&w=960 720w,https://www.datocms-assets.com/159774/1793002584-styrax-inline-industrial-control-cabinet.png?fit=max&fm=webp&q=50&w=960 960w",960,1296,0.7405628002745367,"data:image/jpeg;base64,/9j/4AAQSkZJRgABAQAAAQABAAD/2wCEAAoHBwgHBgoICAgLERMLDhcWDRURDhUVFhENFxwZGCITFhUaHysjGh0oHRUWJDUlKC0vMjIyGSI4PTcwPCsxMi8BCgsLBQoKFQoFEC8cFhwvLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vL//AABEIABkAEgMBIgACEQEDEQH/xAAYAAEBAAMAAAAAAAAAAAAAAAAFBgABB//EACQQAAEDAgQHAAAAAAAAAAAAAAEAAwUCBBESITIVIjRBQlFx/8QAFgEBAQEAAAAAAAAAAAAAAAAAAAMC/8QAFBEBAAAAAAAAAAAAAAAAAAAAAP/aAAwDAQACEQMRAD8AtH4Au06FBysM6wxUKU+w7eVeSLl3rrE01FVZRZj7nE6LSdyPelpA3TxW1PNQUBK30i5dZcpXR5Puoi+68fUBgEjhtKxUA2hYg//Z","(max-width: 960px) 100vw, 960px","/amtc-und-das-environmental-experts-meilenstein-der-fotomaskenherstellung/",[261,320,350,386,411,445],{"type":262,"id":263,"anchor":94,"background":264,"ctaButton":265,"headline":273,"primaryButton":274,"semanticOfHeadline":282,"tagline":94,"text":283,"textSideBySide":176},"TextRecord","LQOKL6LmSrq9fcf090-1vg","neutral-0",{"value":266,"links":272},{"schema":233,"document":267},{"type":235,"children":268},[269],{"type":238,"children":270},[271],{"type":241,"value":94},[],"Dekarbonisierung beginnt dort, wo Emissionen entstehen",{"value":275,"links":281},{"schema":233,"document":276},{"type":235,"children":277},[278],{"type":238,"children":279},[280],{"type":241,"value":94},[],"h2",[284,295],{"text":285,"textStyle":294},{"value":286,"links":293},{"schema":233,"document":287},{"type":235,"children":288},[289],{"type":238,"children":290},[291],{"type":241,"value":292},"Die Herstellung moderner Halbleiter ist ohne fluorierte Prozessgase nicht möglich. Gleichzeitig zählen insbesondere Perfluorcarbone wie Tetrafluormethan (CF₄) aufgrund ihres sehr hohen Treibhauspotenzials zu den größten Herausforderungen für die Klimabilanz der Branche.",[],"grey_large",{"text":296,"textStyle":319},{"value":297,"links":318},{"schema":233,"document":298},{"type":235,"children":299},[300,304,308],{"type":238,"children":301},[302],{"type":241,"value":303},"Auch bei der Herstellung von Photomasken, einem der zentralen Produktionsmittel der Halbleiterfertigung, entstehen Prozessabgase, die aufbereitet werden müssen. Mit der erfolgreichen Inbetriebnahme der Plasma-Wet-Anlagen von DAS Environmental Experts stellt das AMTC die Abgasbehandlung in der Maskenproduktion konsequent auf eine elektrische und zukunftsfähige Technologie um. Damit übernimmt das Unternehmen eine Vorreiterrolle in der nachhaltigen Photomaskenfertigung und setzt neue Maßstäbe bei der Reduzierung prozessbedingter Emissionen.",{"type":238,"children":305},[306],{"type":241,"value":307},"Ein wichtiger Hebel liegt dabei in der technischen Infrastruktur der Fertigung. In der Subfab behandeln die Anlagen von DAS Environmental Experts hochklimawirksame Prozessgase direkt an ihrer Entstehungsquelle und schaffen so eine wesentliche Voraussetzung für eine klimafreundlichere Produktion. Mit steigenden Produktionskapazitäten und wachsenden Anforderungen an die Klimabilanz von Halbleiterstandorten gewinnt die technische Infrastruktur der Fabriken weiter an Bedeutung. Eine leistungsfähige Abgasbehandlung entwickelt sich damit vom notwendigen Bestandteil des Produktionsprozesses zunehmend zu einem strategischen Hebel für die Dekarbonisierung.",{"type":238,"children":309},[310,312,316],{"type":241,"value":311},"Durch die Umstellung auf die elektrisch mit 100% erneuerbarem Strom betriebenen STYRAX Plasma-Wet-Anlagen reduziert AMTC den Einsatz von Erdgas bzw. die damit verbundenen CO₂ -Emissionen um weitere ",{"type":241,"marks":313,"value":315},[314],"strong","21% bezogen auf Gesamtemissionen 2026",{"type":241,"value":317},". Zusätzlich wird der aufwendig aus der Umgebungsluft gewonnene Sauerstoff eingespart, der für die Verbrennung notwendig wäre, was dessen Anlieferung unnötig macht und damit zusätzliches CO2 aus Straßentransporten einspart.",[],"standard",{"type":321,"id":322,"anchor":94,"background":264,"testimonial":323},"TestimonialBlockRecord","e0LtpU41TE2K4GI9LpDw1A",[324],{"id":325,"quote":326,"media":335,"nameContactPerson":348,"nameCompany":349},"bLq2GT3rRmurnSm1InzQXQ",{"value":327,"links":334},{"schema":233,"document":328},{"type":235,"children":329},[330],{"type":238,"children":331},[332],{"type":241,"value":333},"„Mit der erfolgreichen Inbetriebnahme haben wir einen weiteren wichtigen Schritt auf unserem Weg zur klimafreundlichen Photomaskenfertigung erreicht. Ökologische Nachhaltigkeit entsteht nicht allein im Reinraum, sondern ebenso in der technischen Infrastruktur einer Fabrik. Gemeinsam mit DAS Environmental Experts setzen wir genau dort an, wo ein wesentlicher Teil der Emissionen entsteht.\"",[],{"id":336,"url":337,"alt":338,"responsiveImage":339},"VbcxFTS8QDG1TuVRee6Pnw","https://www.datocms-assets.com/159774/1793002359-thomas-schmidt_amtc_2.jpg","Ein professionell gekleideter Mann in einem marineblauen Anzug und einem weißen Hemd steht selbstbewusst vor einem minimalistischen, hellgrauen geometrischen Hintergrund.",{"src":340,"srcSet":341,"width":342,"height":343,"aspectRatio":344,"alt":338,"title":345,"base64":346,"sizes":347,"webpSrcSet":341},"https://www.datocms-assets.com/159774/1793002359-thomas-schmidt_amtc_2.jpg?fit=max&fm=webp&h=100&q=50&w=150","https://www.datocms-assets.com/159774/1793002359-thomas-schmidt_amtc_2.jpg?dpr=0.5&fit=max&fm=webp&h=100&q=50&w=150 59w,https://www.datocms-assets.com/159774/1793002359-thomas-schmidt_amtc_2.jpg?dpr=0.75&fit=max&fm=webp&h=100&q=50&w=150 89w,https://www.datocms-assets.com/159774/1793002359-thomas-schmidt_amtc_2.jpg?fit=max&fm=webp&h=100&q=50&w=150 119w,https://www.datocms-assets.com/159774/1793002359-thomas-schmidt_amtc_2.jpg?dpr=1.5&fit=max&fm=webp&h=100&q=50&w=150 178w,https://www.datocms-assets.com/159774/1793002359-thomas-schmidt_amtc_2.jpg?dpr=2&fit=max&fm=webp&h=100&q=50&w=150 238w,https://www.datocms-assets.com/159774/1793002359-thomas-schmidt_amtc_2.jpg?dpr=3&fit=max&fm=webp&h=100&q=50&w=150 357w,https://www.datocms-assets.com/159774/1793002359-thomas-schmidt_amtc_2.jpg?dpr=4&fit=max&fm=webp&h=100&q=50&w=150 477w",119,100,1.1930091185410334,"Portrait Thomas Schmidt, General Manager, AMTC Dresden","data:image/jpeg;base64,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","(max-width: 119px) 100vw, 119px","Thomas Schmidt, General Manager","AMTC Dresden",{"type":262,"id":351,"anchor":94,"background":352,"ctaButton":353,"headline":361,"primaryButton":362,"semanticOfHeadline":282,"tagline":94,"text":370,"textSideBySide":385},"K45qyXnoTF-oQpDV-JnH_w","neutral-3",{"value":354,"links":360},{"schema":233,"document":355},{"type":235,"children":356},[357],{"type":238,"children":358},[359],{"type":241,"value":94},[],"Umwelttechnologie als Wegbereiter klimaneutraler Hightech-Produktion",{"value":363,"links":369},{"schema":233,"document":364},{"type":235,"children":365},[366],{"type":238,"children":367},[368],{"type":241,"value":94},[],[371],{"text":372,"textStyle":94},{"value":373,"links":384},{"schema":233,"document":374},{"type":235,"children":375},[376,380],{"type":238,"children":377},[378],{"type":241,"value":379},"Für DAS Environmental Experts bestätigt das Projekt, welche Rolle die Abgasbehandlung auf dem Weg zu einer klimaneutralen Halbleiterfertigung spielt. Das Unternehmen bringt jahrzehntelange Erfahrung in der Behandlung komplexer Prozessabgase und in der Entwicklung von Technologien für die Halbleiterindustrie ein. DAS Environmental Experts begleitet Halbleiterhersteller damit nicht nur bei der sicheren Abgasbehandlung, sondern auch bei der nachhaltigen Weiterentwicklung ihrer Produktionsinfrastruktur.",{"type":238,"children":381},[382],{"type":241,"value":383},"Dabei geht es längst nicht mehr nur um die sichere Behandlung von Prozessabgasen. 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