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Indem Sie auf „Alle Cookies akzeptieren“ klicken, stimmen Sie der Speicherung von Cookies auf Ihrem Gerät und der damit verbundenen Datenverarbeitung zu. So können wir die Website-Navigation verbessern, die Website-Nutzung analysieren und unsere Inhalte weiterentwickeln. Sie können Ihre Einwilligung jederzeit über die Schaltfläche „Einstellungen verwalten“ in unserer Cookie Mitteilung widerrufen.","Konfigurieren","Ich lehne ab","Ich stimme zu","Auswahl speichern","Alles akzeptieren","1",[87,96,103],{"key":88,"name":89,"description":90,"function":91,"cookie":95},"marketing","Marketing","Diese Dienste erkennen, aus welchen Unternehmen Besucher auf unsere Website kommen, damit unser Vertrieb Interessenten gezielt ansprechen kann. Eingesetzt wird dafür SalesViewer®; die Erkennung erfolgt unternehmensbezogen. Ohne Ihre Einwilligung wird der Dienst nicht geladen. Einzelheiten finden Sie in unserer Datenschutzerklärung.",[92],{"kind":93,"params":94},"GTagManager","",[],{"key":97,"name":98,"description":99,"function":100,"cookie":102},"anonymised_statistics","Anonymisierte Statistik","Mit anonymisierten Statistiken messen wir, wie die Website genutzt wird, um sie zu verbessern. Eingesetzt wird dafür Matomo; die Daten werden nicht mit einzelnen Personen verknüpft. Ohne Ihre Einwilligung wird nichts gemessen.",[101],{"kind":93,"params":94},[],{"key":104,"name":105,"description":106,"function":107,"cookie":109},"essential_functions","Essentielle Funktionen","Dazu gehören wichtige Funktionen wie die Seitennavigation und die Suche nach Produkten. 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Die neue Abgasreinigungsanlage ALCEA zur NOx-Behandlung erweitert das Portfolio. Erste Halbleiterhersteller in Taiwan haben die Anlage bereits installiert.",{"type":245,"alt":246,"id":247,"title":248,"url":249,"focalPoint":250,"responsiveImage":252},"AltTitleFileField","Das Bild zeigt ein Diagramm mit dem Titel „Subfab NetZero: Die nächste Stufe der Effizienz“, das einen vierstufigen Prozess detailliert darstellt, bestehend aus „Clean“ (Emissionen an der Quelle behandeln), „Measure“ (Umweltleistung sichtbar machen), „Control“ (intelligent auf den Prozess reagieren) und „Optimise“ (sich kontinuierlich verbessern), wobei jeder Schritt durch ein Symbol auf einem farbigen, kreisförmigen Pfad dargestellt wird.  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Gleichzeitig steigen die Anforderungen, Emissionen und Ressourcenverbrauch in der Chipfertigung zu reduzieren und die Betriebskosten im Griff zu behalten. Ein wichtiger Ansatzpunkt ist die technische Infrastruktur unterhalb des Reinraums, die sogenannte Subfab. Auf der SEMICON Europa präsentiert DAS Environmental Experts erstmals das unter dem Namen „Subfab NetZero“ eigens entwickelte Konzept, das Abgasreinigung, Emissionsmessung, digitale Vernetzung und intelligente Anlagensteuerung miteinander verbindet. Mit dem neuen Abgasreinigungssystem ALCEA zur Behandlung von Stickoxiden erweitert das Unternehmen zugleich sein Portfolio für die Emissionsminderung. Erste Halbleiterhersteller beschäftigen sich bereits mit möglichen Anwendungen des integrierten Ansatzes.",[],{"type":295,"id":296,"anchor":94,"background":297,"headline":298,"tagline":94,"text":299,"semanticOfHeadline":282,"mediaAlignRight":176,"mediaBlock":308,"ctaButton":326,"primaryButton":334},"MediaTextRecord","GdUHP0xqQnGUdwYr9DIX9g","neutral-3","Die verborgene Infrastruktur der Halbleiterfertigung",{"value":300,"links":307},{"schema":234,"document":301},{"type":236,"children":302},[303],{"type":239,"children":304},[305],{"type":242,"value":306},"Die Subfab ist ein unverzichtbarer Bestandteil moderner Halbleiterfabriken. Hier arbeiten unter anderem Vakuumpumpen, Prozessgasreinigungssysteme und weitere technische Anlagen, die den Betrieb hochkomplexer Fertigungsprozesse ermöglichen. Ihr Einfluss auf den Energieverbrauch, den Einsatz von Gasen, Wasser und Chemikalien sowie den Emissionsausstoß einer Fab ist immens. Dank kontinuierlicher technologischer Innovationen durch Unternehmen wie DAS Environmental Experts konnten die Effizienz und Leistungsfähigkeit entsprechender Systeme in den vergangenen Jahren deutlich gesteigert werden. Die größten Optimierungspotenziale sehen die Experten jedoch in einer ganzheitlichen Betrachtung der Halbleiterproduktion, bei der Fertigungsprozesse und Behandlungsstufen in der Subfab optimal aufeinander abgestimmt werden.",[],[309],{"type":310,"id":311,"hideMediaDescription":312,"mediaDescription":94,"image":313,"imageGradient":176},"NestedMediaElementImageRecord","TT7PPSOnTfuzZ2JvuvTNUA",true,{"alt":314,"id":315,"title":316,"url":317,"responsiveImage":318},"Das Bild zeigt eine moderne Subfabrik mit Abgasreinigungsanlagen.","RH_WIBe9Q3eBKcXolWE10w","DAS EE Produkte in der Subfab","https://www.datocms-assets.com/159774/1767967158-waste-gas-abatement.png",{"src":319,"srcSet":320,"width":321,"height":322,"aspectRatio":323,"alt":314,"title":316,"base64":324,"sizes":325,"webpSrcSet":320},"https://www.datocms-assets.com/159774/1767967158-waste-gas-abatement.png?fit=max&fm=webp&h=630&q=50&w=960","https://www.datocms-assets.com/159774/1767967158-waste-gas-abatement.png?dpr=0.25&fit=max&fm=webp&h=630&q=50&w=960 235w,https://www.datocms-assets.com/159774/1767967158-waste-gas-abatement.png?dpr=0.5&fit=max&fm=webp&h=630&q=50&w=960 471w,https://www.datocms-assets.com/159774/1767967158-waste-gas-abatement.png?dpr=0.75&fit=max&fm=webp&h=630&q=50&w=960 707w,https://www.datocms-assets.com/159774/1767967158-waste-gas-abatement.png?fit=max&fm=webp&h=630&q=50&w=960 943w,https://www.datocms-assets.com/159774/1767967158-waste-gas-abatement.png?dpr=1.5&fit=max&fm=webp&h=630&q=50&w=960 1415w,https://www.datocms-assets.com/159774/1767967158-waste-gas-abatement.png?dpr=2&fit=max&fm=webp&h=630&q=50&w=960 1887w",943,630,1.4981273408239701,"data:image/jpeg;base64,/9j/4AAQSkZJRgABAQAAAQABAAD/2wCEAAoHBwgHBgoICAgQEBILDhgcFA0SDh0WDg0OFxMZHiITIhUaHysjGh0oHRUWJDUlKC0vMjIyGSU4PTcwPCsxMi8BCgsLDg0NFQ0QGC8cFhwvLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vLy8vL//AABEIABEAGAMBIgACEQEDEQH/xAAYAAEAAwEAAAAAAAAAAAAAAAAAAwQFBv/EACEQAAEEAgAHAAAAAAAAAAAAAAABAgQFAxIGERMzNDVB/8QAFQEBAQAAAAAAAAAAAAAAAAAAAgT/xAAXEQEBAQEAAAAAAAAAAAAAAAABABIC/9oADAMBAAIRAxEAPwDmoXD2KUiOU3n0UNIzMbnFung6YOSlmbWO1a/YJ0SeGrSuF69lUjlcDSlwupUtbv8AALRHLR1vaQ0J3jIATlS0eb1yAAUL/9k=","(max-width: 943px) 100vw, 943px",{"value":327,"links":333},{"schema":234,"document":328},{"type":236,"children":329},[330],{"type":239,"children":331},[332],{"type":242,"value":94},[],{"value":335,"links":341},{"schema":234,"document":336},{"type":236,"children":337},[338],{"type":239,"children":339},[340],{"type":242,"value":94},[],{"type":263,"id":343,"anchor":94,"background":265,"ctaButton":344,"headline":352,"primaryButton":353,"semanticOfHeadline":282,"tagline":94,"text":361,"textSideBySide":176},"UEYzLZpmTXmSeSAhbRVUtQ",{"value":345,"links":351},{"schema":234,"document":346},{"type":236,"children":347},[348],{"type":239,"children":349},[350],{"type":242,"value":94},[],"Warum die Subfab jetzt stärker in den Fokus rückt ",{"value":354,"links":360},{"schema":234,"document":355},{"type":236,"children":356},[357],{"type":239,"children":358},[359],{"type":242,"value":94},[],[362],{"text":363,"textStyle":94},{"value":364,"links":371},{"schema":234,"document":365},{"type":236,"children":366},[367],{"type":239,"children":368},[369],{"type":242,"value":370},"Drei Entwicklungen treiben diesen Wandel voran. Erstens erhöhen steigende Kosten für Energie, Wasser und Betriebsmittel den wirtschaftlichen Druck auf Halbleiterhersteller. Insbesondere KI-Anwendungen, Rechenzentren und High-Performance-Computing treiben die Nachfrage nach leistungsfähigen Chips auf ein neues Niveau und machen Effizienzsteigerungen in der Produktion wichtiger denn je. Zweitens wachsen die Anforderungen von Kunden, Investoren und Regulierungsbehörden an die transparente Erfassung und Reduzierung von Umweltwirkungen. Drittens benötigen Unternehmen für Investitionsentscheidungen und Dekarbonisierungsmaßnahmen eine belastbare Datengrundlage zu Emissionen, Verbräuchen und Einsparpotenzialen. Gleichzeitig ermöglichen moderne Sensorik, Umweltmesstechnik und digitale Vernetzung erstmals eine durchgängige Betrachtung von Fertigungsprozessen und Subfab-Systemen. Dadurch lassen sich bisher isolierte Anlagenbereiche gezielt aufeinander abstimmen und zusätzliche Effizienzpotenziale erschließen.",[],{"type":373,"id":374,"anchor":94,"background":297,"testimonial":375},"TestimonialBlockRecord","IXpt5FiBT4uQkqp5seA9gw",[376],{"id":377,"quote":378,"media":387,"nameContactPerson":398,"nameCompany":399},"ItKE4RKGRcOpIM-KvdaFbA",{"value":379,"links":386},{"schema":234,"document":380},{"type":236,"children":381},[382],{"type":239,"children":383},[384],{"type":242,"value":385},"„Die Halbleiterindustrie hat enorme Fortschritte bei der Reinigung von Prozessabgasen gemacht. Das nächste Potenzial liegt darin, die Umweltleistung der gesamten Subfab besser zu verstehen und ihren Betrieb intelligenter zu steuern. Wenn wir Emissionen und Betriebszustände kontinuierlich erfassen und die Anlagen darauf abgestimmt betreiben, können wir Umweltleistung und Ressourceneffizienz gemeinsam verbessern. Genau diesen Ansatz verfolgen wir mit Subfab NetZero.\"",[],{"id":388,"url":389,"alt":94,"responsiveImage":390},"I0pzON_URWSbr129U_qhRA","https://www.datocms-assets.com/159774/1747916394-portrait-guydavies-1920x1920px.jpg",{"src":391,"srcSet":392,"width":393,"height":393,"aspectRatio":394,"alt":94,"title":395,"base64":396,"sizes":397,"webpSrcSet":392},"https://www.datocms-assets.com/159774/1747916394-portrait-guydavies-1920x1920px.jpg?fit=max&fm=webp&h=100&q=50&w=150","https://www.datocms-assets.com/159774/1747916394-portrait-guydavies-1920x1920px.jpg?dpr=0.5&fit=max&fm=webp&h=100&q=50&w=150 50w,https://www.datocms-assets.com/159774/1747916394-portrait-guydavies-1920x1920px.jpg?dpr=0.75&fit=max&fm=webp&h=100&q=50&w=150 75w,https://www.datocms-assets.com/159774/1747916394-portrait-guydavies-1920x1920px.jpg?fit=max&fm=webp&h=100&q=50&w=150 100w,https://www.datocms-assets.com/159774/1747916394-portrait-guydavies-1920x1920px.jpg?dpr=1.5&fit=max&fm=webp&h=100&q=50&w=150 150w,https://www.datocms-assets.com/159774/1747916394-portrait-guydavies-1920x1920px.jpg?dpr=2&fit=max&fm=webp&h=100&q=50&w=150 200w,https://www.datocms-assets.com/159774/1747916394-portrait-guydavies-1920x1920px.jpg?dpr=3&fit=max&fm=webp&h=100&q=50&w=150 300w,https://www.datocms-assets.com/159774/1747916394-portrait-guydavies-1920x1920px.jpg?dpr=4&fit=max&fm=webp&h=100&q=50&w=150 400w",100,1,"Portrait-GuyDavies-1920x1920px","data:image/jpeg;base64,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","(max-width: 100px) 100vw, 100px","Dr. Guy Davies, Chief Business Development Officer ","DAS Environmental Experts",{"type":263,"id":401,"anchor":94,"background":265,"ctaButton":402,"headline":410,"primaryButton":411,"semanticOfHeadline":282,"tagline":94,"text":419,"textSideBySide":176},"KxzIVPVJROWCJpN74EOLsA",{"value":403,"links":409},{"schema":234,"document":404},{"type":236,"children":405},[406],{"type":239,"children":407},[408],{"type":242,"value":94},[],"Von einzelnen Abgasreinigungssystemen zu einem integrierten Ansatz",{"value":412,"links":418},{"schema":234,"document":413},{"type":236,"children":414},[415],{"type":239,"children":416},[417],{"type":242,"value":94},[],[420],{"text":421,"textStyle":94},{"value":422,"links":441},{"schema":234,"document":423},{"type":236,"children":424},[425,433,437],{"type":239,"children":426},[427,429],{"type":242,"value":428},"Mit Subfab NetZero entwickelt DAS Environmental Experts einen ganzheitlichen Ansatz, der bestehende Abatement-Technologien mit neuen Möglichkeiten der Emissionsmessung, Vernetzung und intelligenten Betriebsoptimierung verbindet. Grundlage ist ein geschlossener Regelkreis aus vier Funktionen: ",{"type":242,"marks":430,"value":432},[431],"strong","Reinigen, Messen, Validieren, Optimieren.",{"type":239,"children":434},[435],{"type":242,"value":436},"Relevante Emissionen und Betriebszustände sollen möglichst kontinuierlich erfasst werden. Auf dieser Grundlage können Anlagen bedarfsgerecht gesteuert, Ressourcen effizienter eingesetzt und die erzielten Verbesserungen anhand von Messdaten überprüft werden. Das Ziel ist, die Umweltleistung nicht nur einzelner Systeme, sondern der Subfab im Zusammenspiel ihrer Komponenten zu verbessern.",{"type":239,"children":438},[439],{"type":242,"value":440},"DAS Environmental Experts baut dabei auf mehr als drei Jahrzehnten Erfahrung in der Prozessgasbehandlung sowie auf laufenden Entwicklungsarbeiten in den Bereichen Environmental Validation, digitale Schnittstellen und KI-gestützte Datenauswertung auf. Subfab NetZero beschreibt einen langfristigen technologischen Transformationspfad, der bestehende Lösungen mit neuen Entwicklungen verbindet.",[],{"type":295,"id":443,"anchor":94,"background":297,"headline":444,"tagline":94,"text":445,"semanticOfHeadline":282,"mediaAlignRight":176,"mediaBlock":463,"ctaButton":477,"primaryButton":485},"d43W6HYBRyWqHZDBCGKDBA","Neues NOx-Abatement ALCEA erweitert das Portfolio",{"value":446,"links":462},{"schema":234,"document":447},{"type":236,"children":448},[449,458],{"type":239,"children":450},[451,453,456],{"type":242,"value":452},"Wie DAS Environmental Experts sein Technologieportfolio für diesen Ansatz systematisch erweitert, zeigt die neue Abgasreinigungsanlage ",{"type":242,"marks":454,"value":455},[431],"ALCEA",{"type":242,"value":457},". Das System wird auf der SEMICON Europa erstmals dem europäischen Messepublikum präsentiert. ALCEA dient der sekundären Behandlung von Stickoxiden (NOx) und kann direkt in bestehende Abluftkanäle hinter NOx-erzeugenden Abgasbehandlungsanlagen integriert werden. Dadurch benötigt das System keine zusätzliche Stellfläche in der Subfab und eignet sich auch für die Nachrüstung bestehender Anlagen.",{"type":239,"children":459},[460],{"type":242,"value":461},"Unter spezifizierten Betriebsbedingungen kann ALCEA NOx-Emissionen um bis zu 95 Prozent reduzieren. 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Ein Beispiel ist Active Tool Coupling (ATC), mit dem Abgasreinigungssysteme bedarfsgerecht an den tatsächlichen Betriebszustand angeschlossener Fertigungsanlagen angepasst werden können.",{"type":239,"children":504},[505],{"type":242,"value":506},"In einer dokumentierten Anwendung an einer Vierkammer-Ätzanlage mit Inline-Wäscher in einer europäischen Halbleiterfabrik konnte der Brenngasverbrauch gegenüber dem bisherigen Dauerbetrieb um rund 68 Prozent reduziert werden. Auch beim Verbrauch von Sauerstoff, Druckluft und Wasser wurden unter den untersuchten Betriebsbedingungen Einsparungen erzielt.",{"type":239,"children":508},[509],{"type":242,"value":510},"Die Ergebnisse verdeutlichen das Potenzial einer bedarfsgerechten Anlagensteuerung. Sie beziehen sich auf eine konkrete Anwendung und sind nicht mit einer entsprechenden Einsparung für die gesamte Subfab gleichzusetzen.",[],"Weniger Ressourcenverbrauch senkt die Betriebskosten ",{"value":514,"links":520},{"schema":234,"document":515},{"type":236,"children":516},[517],{"type":239,"children":518},[519],{"type":242,"value":94},[],[],{"type":295,"id":523,"anchor":94,"background":297,"headline":524,"tagline":94,"text":525,"semanticOfHeadline":282,"mediaAlignRight":176,"mediaBlock":542,"ctaButton":557,"primaryButton":565},"San9zG9FSziSPpEtNfBAsw","Erste Halbleiterfabriken zeigen Interesse an Subfab NetZero ",{"value":526,"links":541},{"schema":234,"document":527},{"type":236,"children":528},[529,533,537],{"type":239,"children":530},[531],{"type":242,"value":532},"DAS Environmental Experts befindet sich bereits im aktiven Austausch mit ersten Halbleiterfabriken über mögliche Anwendungen von Subfab NetZero. Die bisherigen Gespräche zeigen aus Sicht des Unternehmens ein großes Interesse daran, Emissionsminderung, Ressourceneffizienz und intelligente Anlagensteuerung stärker miteinander zu verbinden.",{"type":239,"children":534},[535],{"type":242,"value":536},"Ab 2027 will DAS Environmental Experts das Konzept schrittweise auch in Asien und Nordamerika vorstellen und gemeinsam mit Fab-Betreibern untersuchen, welche technologischen und wirtschaftlichen Verbesserungen an den jeweiligen Standorten möglich sind. Dabei sollen sowohl bestehende Fertigungsanlagen als auch die Anforderungen neuer Chipfabriken berücksichtigt werden.",{"type":239,"children":538},[539],{"type":242,"value":540},"Der Weg zu einer emissionsärmeren Subfab wird je nach Standort, Fertigungstechnologie und vorhandener Infrastruktur unterschiedlich ausfallen. DAS Environmental Experts versteht Subfab NetZero deshalb nicht als einzelne technische Maßnahme, sondern als langfristigen Transformationsansatz. 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