Electrostatic fine dust collectors

The EDC and EDC PLUS systems are electrostatic dust collectors for point-of-use treatment of process waste gases that contain particles and aerosols. One system can purify waste gas volumes of up to 270 cubic metres per hour. These systems eliminate up to 99.9 % of fine dust particles, such as silicon oxide.

The pretreated process waste gases are first saturated with water and then fed through separator columns, where microparticles, nanoparticles and aerosols are ionised in an electrostatic field and then separated by a grounded film of scrubbing liquid on a rinsed wall. The separated dust is suspended in the scrubbing liquid; this prevents the dust particles from exiting the system and entering the cleanrooms and other sensitive production areas.

Rotary fine dust collectors

The systems of the RDC range use centrifugal force to separate fine dust particles. They are based on the purely mechanical rotor-stator principle: A jet of water is atomised by a high-speed rotating disc. The result is a mist of very fine water drops in which dust particles are centrifuged. The rotor ensures that the waste gases are aspirated and thus moved forward without loss of pressure. The turbulence in the shear gap between the rotor and stator ensures that the water mist and particle-laden process gases are mixed together effectively. The fine dust particles are suspended in the water; the purified waste gas can then be released freely into the environment.