Efficient Waste Gas Treatment for the LED Industry

In the manufacturing of products based on innovative light emitting diode (LED) technology, ammonia and hydrogen are used in large quantities as process gases. The environmental engineers at DAS have recognized this market trend and developed new solutions for the environmentally friendly treatment of the process gases.

Safe LED Manufacturing with Systems from DAS

The LED industry is one of the fastest growing high-tech markets for years already. After LED backlighting for the small LC displays of mobile phones and the LC displays of larger screens in the television market, the next potential growth market is the lighting industry. A mass market of this scale

for LEDs also means increasing emissions that need to be abated by specific waste gas treatment systems at the point of use. The environmental engineers at DAS have recognized this market trend and developed new solutions such as LARCH for waste gas treatment in MOCVD processes.

Efficient Treatment of Hydrogen and Ammonia

The Environmental Experts from DAS offer the waste gas treatment system LARCH, which is especially designed for MOCVD processes (metal-organic chemical vapor deposition – MOCVD). It is capable of treating large flows of hydrogen and ammonia as well as small flows of metal-organics and dopants, which are typically found in common LED processes.

The system operates in three steps. Firstly, the process waste gases are introduced through a special packed inlet into the decomposition zone. There, the decomposition of Ammonia takes place. Subsequently the Hydrogen is electrically ignited and oxidized. The waste gases are burned and oxidized within the reactor. Finally the waste gases are cooled by a heat exchanger.

Thanks to the DAS technology the cleaned gas can be released into the environment without any further treatment. Sensors and a variety of redundant safety facilities guarantee stable and safe operation. The process relies on a simple principle, and yet can achieve economically low emission levels. Thus, it is able to replace the previously used wet scrubbing stage that produced the large amounts of ammonia. It is also much more environmentally friendly.