Reliable Waste Gas Treatment for the TFT Industry

Waste gases accrued in production processes of the TFT/LCD industry contain residuals of process gases silane SiH4, ammonium NH3 and nitrogen oxide N2O. Some of these substances are highly caustic, are toxic or highly flammable and need to be treated at the point-of-use. DAS offers customers reliable solutions for the specific waste gas treatment issue.

Safe TFT Production with Waste Gas Treatment Systems by DAS

Manufacturing TFT/LCD displays requires waste gas treatment. Processes that produce large scale Thinfilm Transistors (TFT) on glass substrates, for instance, use Chemical Vapor Deposition – CVD – to separate the thin films onto the material. The process requires cleaning the process chamber periodically and usually employs etching with NF3. Etching of the separated thin films typically utilizes CF4, SF6 and chlorinated gases,

which release large amounts of waste gas mixtures that can be treated by burn/wet systems or electrostatic filters. Systems designed by DAS Environmental Experts clean the process waste gases directly at their point of origin (Point of Use) and abate the hazardous substances reliably. DAS has developed solutions specifically for the TFT/LCD industry to safely handle large volumes with exhaust gases meeting the legal requirements.

Safe Treatment of Dangerous Waste Gases

Waste gases accrued in production processes of the TFT/LCD industry contain residuals of process gases silane SiH4, ammonium NH3 and nitrogen oxide N2O. These waste gases pose a significant risk to the environment, but also to the safety of the production facilities. Merging different waste gases in the factory’s central waste gas system often creates highly flammable or highly explosive gaseous mixtures, which pose a serious safety hazard and hence must to be avoided at all times. Aggressive gases also contribute to the accelerated corrosion of pumps, valves and pipes to further compromise the facility’s safety, and small particles contained in the waste gas stream can deposit inside pipes and clog them, causing increased maintenance or even a complete production shutdown.

DAS waste gas abatement technology is based on a flexible, integrated system concept. Our smallest equipment fits into a closet of less than 1 square metre footprint. DAS technology is fully automated and sensor-controlled and meets the highest certified safety standards.