Point-of-Use Waste Gas Treatment with UPTIMUM
UPTIMUM is part of the burn/wet technology portfolio of DAS Environmental Expert. The system is specifically designed to meet a higher uptime demand in specific CVD processes. The gases are burnt from top to bottom. UPTIMUM systems are applied at different processes in the semiconductor and photovoltaics industry.
All UPTIMUM systems have a small footprint with service and maintenance access from the front and back. Installation is quick and easy and does not require specialized equipment. Operation costs and general safety can be optimized with a process tool interface.
Operating Principle of the UPTIMUM Systems
Process waste gases are induced through a maximum of six separate inlets. Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis). A fluid wall/film prevents corrosion and deposition of particles in the reactor. In the washing column next to the reactor, soluble components are absorbed, and particles suspended. The scrubbing liquid cools down and neutralizes combustion products such as hydrogen halides. With the application of UPTIMUM within a holistic abatement concepts, manufacturers in the high-tech industry will meet the strict standards of the German air pollution law (TA Luft).
UPTIMUM – Efficient Point-of-Use Waste Gas Treatment of CVD Processes
UPTIMUM is optimized for up to six independent inlets from CVD processes in different industry areas. The system runs with different fuel gases and scrubbing liquids.
- Runs with different fuel gases
- Low water consumption through closed-loop design
- Dimension (W x D x H): 1525 mm x 1050 mm x 2100 mm
- Access to maintenance area on front and back side
- Gas entry: up to 6 x DN25 or 4 x DN 40
- Gas outlet: max. DN100
Configuration Options of UPTIMUM
The following equipment options are available for all UPTIMUM systems:
- Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz
- Fuel Gas: NG, LPG
- Oxidant: O2, CDA
- Closed-loop system: Water, Lye
- Heated feed lines and inlets
- Signal Tower
- Drip Pan
- Earthquake Safety Kit
- SEMI S2 certification