Subfab360 — Showcase Project for Innovative Collaboration

Subfab360 — Showcase Project for Innovative Collaboration

Subfab360 — Showcase Project for Innovative Collaboration “Network in the spotlight”: Microelectronics, software and supplier companies work together on the resource-efficient sub-fab. We are proud to be a partner in this new, advanced form of collaboration within the...
TSUGA — A Success Story

TSUGA — A Success Story

TSUGA — A Success Story In semiconductor production, the effective removal of nitrogen oxides (NOx) is of crucial importance. DeNOx is a process used to remove nitrogen oxides that are produced during semiconductor production and the subsequent purification of process...
DAS EE is ready for H2!

DAS EE is ready for H2!

DAS EE is ready for H2! We’re ready for H2 ‒ are you too?   We support our customers on their way to an emission-free abatement. Thanks to our advanced technology, all DAS EE burn-wet systems can be operated with hydrogen. Whether hybrid operation,...