Use of Hydrogen in Waste Gas Treatment in the Semiconductor Industry
The semiconductor industry faces the key challenge of reducing its CO₂ emissions, while at the same time, as an energy-intensive industry with complex manufacturing processes, it is faced with increasing demand. A study by the Boston Consulting Group (BCG) forecasts an annual increase in carbon emissions from semiconductor production of around eight per cent if growth continues unabated, with an expected peak only around 2045. This forecast contrasts with the ambitious targets set by the leading global semiconductor manufacturers themselves, who are aiming for a ‘net zero’ balance for greenhouse gas emissions. The discrepancy between the forecast increase in emissions and the industry’s sustainability
targets emphasises the urgency and complexity of the upcoming transformation task in the semiconductor sector.
The semiconductor industry is focussing on switching to renewable energies, improving energy efficiency in production tools and reducing process gas emissions. By working closely with suppliers, companies are endeavouring to reduce emissions along the entire value chain. To achieve this goal in exhaust gas purification, green hydrogen represents an alternative energy source to fossil fuels, as it enables CO₂-free combustion.
Benefits for Waste Gas Treatment
Higher Flame Temperature
The combustion of hydrogen generates higher peak temperatures than natural gas, which facilitates the decomposition of complex compounds such as perfluorocarbons (PFCs) or nitrogen trifluoride (NF3).
Clean Combustion Products
Hydrogen combustion produces only water (H₂O) and no CO₂ emissions, reducing the system’s CO₂ footprint caused by fuel gas.
Hydrogen-capable systems from DAS EE
DAS Environmental Experts offers innovative solutions for decarbonisation through the use of hydrogen in exhaust gas purification systems. Our burner-wet systems can be operated with green hydrogen to make an important contribution to reducing CO₂ emissions.
Our proven ESCAPE and STYRAX product lines are already designed to run on hydrogen or can be retrofitted to do so. Existing systems can be easily upgraded by replacing the fuel gas train and some components.
Make your Manufacturing Processes more Sustainable
The use of green hydrogen in the semiconductor industry enables companies to better meet their ESG (Environmental, Social, Governance) goals by significantly reducing their CO₂ emissions while making their manufacturing processes more sustainable. Through the use of our H₂-capable abatement systems, we support our customers in their journey towards sustainable and low carbon production. As an established supplier with many years of experience in working with hydrogen, we can offer reliable and high-quality solutions for retrofitting existing systems, thus helping to reduce the conversion effort in the sub-fab.
Together we are shaping the future of the semiconductor industry – environmentally friendly and efficient!
Consulting
Find out now about the use of Hydrogen as an alternative energy source for your subfab.
Dr. Christian Kuhne
Director Sales Global