Reliable and Safe Exhaust Gas and Water Treatment for the Solar Industry
Different gases are released during the production of solar cells. Our compact and efficient off-gas systems combine safe and reliable scrubbing and burning operations in the tightest of spaces. Aware that off-gas cleaning is crucial to the safety of the manufacturing process, we develop and manufacture burner/scrubber disposal solutions and electrostatic filters for off-gas flows up to 5,000 m³/h.
Our customers in the solar industry benefit from our strong technical understanding of the production processes for thin film silicon modules and crystalline cells, especially for CVD, TCO and drying processes.
In principle, DAS plants can treat condensable, combustible, corrosive, reactive, toxic and/or pyrophoric waste gases (e.g. silanes, silane organics, terpineols, hydrogen, ammonia or hydrogen halides) as well as fine dusts.
Experts from DAS Environmental Expert are not only available for planning the initial equipment, but also help with optimization and cost reduction in the running process. Learn more by reading our case study on cost reduction in a silicon thin film production line.
Point-Of-Use Exhaust Gas & Wastewater Treatment from DAS EE for the Solar Industry
Insight into our product portfolio:
- Exhaust gas cleaning systems
- Removal of condensable organic compounds (VOC’s)
- Reduction of particulate matter emissions
- (Waste) water treatment and recycling
Pollution Abatement Facility: The Combined Exhaust Gas Cleaning and Wastewater Treatment for the Solar Industry
Cleaning and rinsing, cutting and sawing, pickling, texturing and coating, right through to cleaning the fab — in the solar industry, various highly contaminated waste gases and wastewater are produced along the process chain surrounding the processing of silicon. Fine dusts are produced, as well as highly alkaline or acidic waters, which have to be treated. The removal of PEG, fluoride or ammonium from the water may also be necessary, depending on the process. In addition, ultrapure water with high requirements is needed in production.
With the Pollution Abatement Facility for Solar Fabs (PAF) DAS EE offers a holistic plant from one source, which is specially adapted to the combined waste gas and waste water treatment of production facilities in the solar industry.
Your Advantages
- Integrated waste gas disposal plus water and waste water treatment
- Safe, reliable, cost-efficient
- Globally proven references
Cost savings thanks to water recycling - Removal of fine dust and aerosols
- Scalable from laboratory applications to gigawatt factories
- Efficient use of chemicals thanks to coordinated systems
Application Areas
- Waste water treatment after exhaust gas cleaning
- DI water treatment
- Treatment of washing and rinsing water
Measurements and Case Studies from DAS
SEMICON Korea 2026
We are excited to announce our participation at SEMICON Korea 2026! From February 11 to 13, 2026, we will be exhibiting at Booth C643, COEX, Seoul. This year, our focus is on the synergies between point-of-use waste gas abatement and water treatment & recycling:…
Chemical-physical Water Treatment Plant for a Leading High-tech Manufacturer
Chemical-physical Water Treatment Plant for a Leading High-tech ManufacturerA leading silicon wafer manufacturer is expanding its fab with a new water treatment plant from DAS Environmental Experts. The plant efficiently treats fluoride, silicon-containing…
SEMICON Japan 2025
We are delighted to be part of SEMICON Japan again this year! From December 17 to 19, 2025, we will be exhibiting at the SAXONY! community booth at the Tokyo Big Sight Convention Center (West Hall, Booth W1007). Visit us and learn more about our sustainable solutions…
Semicon Europa 2025
DAS Environmental Experts will once again be exhibiting at SEMICON Europa this year. From 18 to 21 November 2025, we will be welcoming visitors to our stand B1361 in Munich. Come and discover our solutions for sustainable semiconductor manufacturing – from efficient…
SEMICON West 2025
Phoenix and Arizona are fast becoming an international hotspot for semiconductor manufacturing. The upcoming SEMICON West 2025, which will be held at the Phoenix Convention Center from October 7 to 9, 2025, underscores this importance. The region is also becoming…
SEMICON Taiwan 2025
Celebrating 30th anniversary of SEMICON Taiwan For over two decades, DAS Taiwan has been actively shaping technological change in the semiconductor industry. This year, we are especially looking forward to celebrating the 30th anniversary of SEMICON Taiwan together…
TSUGA: From a Master Thesis to a Successful DeNOx Solution
TSUGA: From a Master Thesis to a Successful DeNOx SolutionIn semiconductor production, the effective removal of nitrogen oxides (NOx) is of crucial importance. These harmful compounds are produced during the production process and pose a significant risk…
Sustainable wastewater treatment plants and reprocessing concepts for the semiconductor industry
Sustainable Wastewater Treatment Solutions for the Semiconductor IndustryDAS Environmental Experts offers customised, sustainable wastewater solutions and recycling concepts for the semiconductor industry. With high quality standards and individual project…
Water-Intensive High-Tech Companies Rely on DAS EE Solutions
Water-Intensive High-Tech Companies Rely on Water Recycling Solutions from DAS EEReliable wastewater treatment with optimised water consumption — this was the order one of the leading battery producers approached DAS Environmental Expert GmbH with. The…
Case Study Pilot Plant Med-zeroSolvent
DAS EE pilot plant in the “Med-zeroSolvent” project treats solvent-containing process wastewaterMedical wastewater poses a major challenge for water management — both in the clinical environment and in the production of pharmaceuticals and medical devices.…