Our Portfolio for Waste Gas Treatment at the Point of Use
Our Waste Gas Treatment Portfolio at a Glance
Concepts for Waste Gas Treatment
Since 1991 DAS Environmental Experts has developed and produced client-specific point-of-use facilities for waste gas treatment in the global high-tech industries. This is how we support the technological development of our society and, at the same time, protect people and the environment. The treatment of industrial waste gases serves the protection of people and the environment as well as the stability of the production process. DAS Environmental Experts has dedicated itself to this task more than 35 years ago. Our abatement concepts are always customized and manufactured according to high industrial standards in Germany.
Our worldwide service teams professionally support all systems installed. Due to our in-house R&D capacities at our Headquarters in Dresden/Germany as well as in the innovation centers in Taiwan and the USA, we cooperate closely with our customers and adopt quickly to new innovation cycles. Our solutions comply with the highest quality and safety standards of the high-tech industry and meet the demanding requirements of the German TA Luft (Technical Instructions on Air Quality Control). All this makes DAS Environmental Experts one of the leading companies in its branch.
“We have trusted DAS waste gas abatement equipment for more than 18 years. The Environmental Experts from Dresden know our high quality standards. Their solutions as well as their professional service significantly contribute towards reaching these standards.”
"As an international microchip manufacturer, we count on the high technological expertise of DAS Environmental Experts. For many years we have depended on the treatment solutions. A deep relationship has grown from this."
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Treatment of Critical Industrial Processes
The manufacture of powerful high-tech products like microchips, photovoltaic modules, flat screens, and Light Emitting Diodes (LEDs) requires highly complex, multistage manufacturing processes. Each production sub-step creates waste gases that have to be abated directly at their point of origin (Point-of-Use).
Planning and Design of Customised Waste Gas Treatment Systems
DAS Environmental Experts partners with manufacturers, building designers and OEMs to develop and optimize waste gas treatment systems. Together we can identify innovative solutions with respect to safety, cost and energy saving as well as connected service.
Process and Product Portfolio for Waste Gas Treatment at Point-of-Use
Point-of-use waste gas abatement systems of DAS Environmental Experts treat process gases as they accrue e.g. in the semiconductor, photovoltaic, LED and TFT industry. DAS scrubbers treat condensable, flammable, corrosive, reactive, toxic and/or pyrophoric gases and fine dust. Our process portfolio includes burn-wet and plasma-wet systems, wet systems, pyrolysis, catalytic systems and electrostatic filters.
Optimization of Waste Gas Abatement Systems
Through the continuous optimization and further development of our customers’ manufacturing processes, the requirements for waste gas treatment are also changing. A modified composition or quantity of process waste gases can affect the efficiency of the system. In addition, changing industry standards for components and assemblies of our systems require the continuous advancement of exhaust gas treatment solutions.
Service and Maintenance of Waste Gas Abatements
Our service teams are available worldwide on demand or as permanent onsite teams at all high-tech locations. Our customer service includes commissioning, professional maintenance, and technical support. We work exclusively with original spare and wear parts worldwide to ensure the safety and efficiency of waste gas treatment.
Beyond Industry Benchmarks: >99.9% DRE for CF4
The semiconductor industry is under increasing pressure to reduce direct greenhouse gas emissions. Tetrafluoromethane (CF₄) is particularly critical due to its high global warming potential and long atmospheric lifetime.
Destruction and removal efficiency (DRE) is therefore a strategic factor. While industry standards range from 95% to 99%, achieving >99.9% DRE reduces residual emissions tenfold, making it an important lever for decarbonization and compliance.
CF₄ is highly stable and requires precisely controlled thermal conditions for efficient decomposition. Optimized burn-wet systems such as TILIA are an established solution.
High-efficiency abatement reduces emissions and long-term costs, turning compliance into a strategic advantage.
Key Questions About Waste Gas Treatment Systems
FAQ
News, Industries & References
All News
Press Release
New Plasma-enhanced Catalytic Secondary Abatement Solution Integrates into Exhaust Ducts to Minimize Subfab Floor Space and Energy Demand.
Event Review
At the Zero Emissions Fab Gate event, experts from industry and research discussed how greenhouse gas emissions, water consumption, and resource use in semiconductor manufacturing can be sustainably reduced. Read about the key insights and ideas from the event.
Press Release
The Advanced Mask Technology Center Dresden (AMTC) and DAS Environmental Experts (DAS EE) are intensifying their cooperation on the path to climate-neutral manufacturing.
Press Release
DAS Environmental Expert GmbH reaffirms its leadership in sustainable semiconductor emissions control with independent validation showing that its TILIA abatement system achieves Destruction and Removal Efficiencies (DRE) exceeding 99.9% for CF₄ and other fluorinated greenhouse gases.
