AMTC Dresden relies on DAS EE for Sustainable Waste Gas Treatment
The Advanced Mask Technology Center Dresden (AMTC) and DAS Environmental Experts (DAS EE) are intensifying their cooperation on the path to climate-neutral manufacturing.
Strong Partnership for Climate-Neutral Photomask Production
With the use of STYRAX plasma-wet systems from DAS EE, AMTC is increasingly converting waste gas treatment in mask production to electrical, sustainable technology. The aim is to significantly reduce CO₂ emissions in the subfab and to drive forward decarbonisation along the entire value chain.
The switch to plasma-based waste gas treatment is a key component of AMTC's strategy for CO₂ neutrality. By electrifying the subfab, AMTC is replacing conventional burner-based waste gas purification systems, thereby sustainably reducing the use of fossil fuels.
“In order to achieve our goal of manufacturing climate-neutral photomasks by 2035, the switch to plasma-based waste gas treatment systems is essential. As a leading company in this field, DAS EE is the best partner for us. Proof of this is our close cooperation in Silicon Saxony.”
Effective treatment of highly climate-damaging process gases
The STYRAX Plasma-Wet systems used are specially designed for treating waste gases containing PFCs (perfluorocarbons) – in particular tetrafluoromethane (CF₄) – from etch processes. CF₄ has an extremely high global warming potential and a very long atmospheric lifetime. Other fluorinated process gases produced in mask manufacturing also contribute significantly to climate change.
DAS EE's plasma technology enables these stable molecules to be destroyed particularly efficiently. The destruction and removal efficiency (DRE) achieved is equivalent to that of commercially available burner-based systems – with significantly lower primary energy requirements and no direct CO₂ emissions.
"We are very pleased to be closely supporting and advising AMTC on its journey towards climate-neutral mask production. For 35 years, we at DAS Environmental Experts have been developing environmental technology solutions for the semiconductor industry and setting standards in the treatment of process gases with high global warming potential. Our partnership underscores our shared commitment to combining high-tech production and climate protection along the entire value chain."
Collaborative approach for sustainable high-tech production
The collaboration between AMTC and DAS EE is long-term and based on a shared understanding of technological responsibility. State-of-the-art waste gas treatment meets state-of-the-art mask manufacturing – with the clear goal of harmonising environmental performance and production requirements.
Delivery of the STYRAX plasma-wet systems is scheduled for March. This will be followed by the hook-up process. Commissioning is planned for the second quarter.
