Point-of-use Waste Gas Treatment Systems
Welcome to the heart of innovation in waste gas treatment! At DAS Environmental Experts, we take immense pride in offering a comprehensive product portfolio designed to revolutionize how industries manage their waste gas emissions. Our dedication to environmental sustainability is evident in our diverse range of treatment processes, which include Burn-Wet and Plasma-Wet Systems, Wet Systems, Burn-Dry Systems, Catalytic Systems, and Particle Separator technologies.
Our Product Portfolio for Industrial Waste Gas Treatment
Discover state-of-the-art solutions in our comprehensive product portfolio for waste gas treatment. From customized point-of-use systems to integrated treatment concepts—we have everything your industry needs.
Our technologies combine precision and efficiency to meet the specific requirements of industries such as semiconductor and photovoltaic production. In our product overview, you will see how advanced design, engineering expertise, and proven performance come together to enhance safety, minimize environmental impact, and streamline production.
We invite you to explore the world of possibilities and discover how we’re leading the way in waste gas treatment for a greener, cleaner future.
Overview
Waste Gas Treatment
ESCAPE DUO – compact point-of-use waste gas abatement from DAS Environmental Experts for the efficient cleaning of a wide variety of process gases in the semiconductor and photovoltaic industries.
Waste Gas Treatment
STYRAX - point-of-use waste gas treatment for ETCH and CVD processes. The choice is yours: burn wet or plasma wet.
Waste Gas Treatment
UPTIMUM is optimized for up to six independent inlets from CVD processes in different industry areas. The system runs with different fuel gases and scrubbing liquids.
Waste Gas Treatment
AQUABATE is a point-of-use scrubber for epitaxy and CVD processes. Learn more about AQUABATE and let us provide you with expert advice!
Waste Gas Treatment
SALIX - Reliable Disposal of Waste Gas Streams from Single Wafer Clean Systems
Waste Gas Treatment
LARCH is our product family, specially developed for MOCVD and EUV processes at the point of use.
Waste Gas Treatment
TSUGA is the stand-alone solution for secondary waste gas treatment of NOx and particulate matter in the semiconductor industry.
Waste Gas Treatment
EDC is an electrostatic particle separator for point-of-use treatment of up to 270 m³/h of particle- or aerosol-laden waste gases.
Treatment of Critical Processes
Our team in Dresden and worldwide leverages extensive technical expertise to provide custom, effective solutions to clients in the semiconductor, MEMS, photovoltaic, and LED industries. The manufacture of powerful high-tech products like microchips, photovoltaic modules, flat screens, and Light Emitting Diodes (LEDs) requires highly complex, multistage manufacturing processes. Each production sub-step creates waste gases that have to be abated directly at their point of origin (Point-of-Use). Lear more about these processes and our solutions here.
"As an international microchip manufacturer, we count on the high technological expertise of DAS Environmental Experts. For many years we have depended on the treatment solutions. A deep relationship has grown from this."
“We have trusted DAS waste gas abatement equipment for more than 18 years. The environmental experts from Dresden know our high quality standards. Their solutions as well as their professional service significantly contribute towards reaching these standards.”
Consulting and Technology Selection
The selection of the appropriate technology is carried out by our application specialists after analyzing the situation on site. Information about the process tool, vacuum pump, gas types and flows as well as the available operating materials are decisive.
In order to ensure a long-term runtime and tool availability, our service and technical support are available on demand or on-site as soon as the system is commissioned.
Director Key Account Management Global
