EDC - Point of Use Waste Gas Treatment of ultrafine particles

EDC stands for “Electrostatic Dust Collector”. This system is perfectly suited for treating process waste gases containing micro- and nanoparticles or aerosols, such as those produced in the photovoltaic, LED, and semiconductor industries.

The image shows a white industrial machine with control buttons and a digital display, labeled "DAS", set against a vibrant purple background, representing the advanced technology of the EDC PLUS by DAS EE.

EDC PLUS – Reduction of Micro- and Nanoparticle Emissions

EDC PLUS is an electrostatic dust collector for point-of-use treatment of micro- and nanoparticle-containing or aerosol-containing process waste gases up to 270 m³/h. The system is designed for applications in the semiconductor industry, as for example for the treatment of particulate emissions generated during the use of arsine (AsH₃) and phosphine (PH₃) in LED manufacturing.

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Efficient treatment of industrial processes with EDC PLUS

The dust collector reduces particle emissions of even the finest particles up to 99.9 % and successfully prevents exhaust blockage. It can be used downstream of most particle generating abatement systems. Access for operating and maintenance is possible from the front and back.

Optimise Your Waste Gas Treatment with EDC PLUS

Optimised for processes with particularly high levels of particles and aerosols in the photovoltaic, LED, TFT/LCD and semiconductor industries

EDC PLUS – Technical Data and Configuration Options

EDC PLUS (Particle Separator)

The waste gases are introduced in a pre-scrubber and following in a tank which also contains the scrubbing liquid. The pre-scrubber is equipped with nozzles, which saturate the gas flow with water, and create a turbulent flow. Afterwards, the waste gas is channeled into the electrostatic dust collector tubes, where the contained micro and nanoparticles are ionised and precipitated in a grounded water film on the water wall. The filtered fine dust is suspended into the scrubber liquid. The dust collector is equipped with an automatic self-cleaning mechanism for the emission electrodes and has an internal backup function: while one column group is being cleaned automatically, the other groups continue the treatment to ensure uninterrupted operation. Remaining residual gases meet the strict German standards for air pollution law (TA Luft).

Consulting and Technology Selection

Do you have questions about EDC PLUS or would you like to learn more about tailor-made solutions for your use case? Let's talk!

Dr. Christian Kuhne

Director Key Account Management Global

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