Point-of-Use Waste Gas Treatment with STYRAX
Burn-Wet and Plasma-Wet Systems for Processes in the Semiconductor Industry
STYRAX – Waste Gas Treatment for Demanding High-Volume Processes
STYRAX is DAS's high-performance product family for demanding high-volume manufacturing environments. The product family includes point-of-use burn-wet and plasma-wet systems with a particularly compact footprint.
It was developed specifically for process gases from CVD, oxide/poly/metal etching, epitaxy, GaN, MOCVD and LED manufacturing. STYRAX is characterised by high efficiency with low environmental impact and achieves excellent destruction and removal efficiency (DRE), for example > 95% for CF₄. Thanks to its high capacity for CVD gases such as H₂, SiH₄, TEOS and many more, as well as comprehensive safety measures, STYRAX protects the environment, health and equipment alike.
Efficient Waste Gas Treatment of Industrial Processes with STYRAX
STYRAX Burn-Wet
The development of the STYRAX product family bases on two significant aspirations for modern waste gas treatment: Improved PFC abatement and Reduced Maintenance Intervals. The scrubbing stage is optimized for HF. Water and/or lye consumption are minimized. A special inlet design prevents clogging. Further options are available to improve maintenance intervals in other processes.
STYRAX Plasma-Wet
The STYRAX plasma-wet systems set new standards in waste gas treatment by using electrical energy directly and highly efficiently. Thanks to the integration of a powerful DC plasma torch and a 15 kW power supply, optimum energy yield is achieved. The proven reactor design and washing stage have been retained, making the STYRAX plasma scrubbers just as reliable and easy to maintain as their natural gas-powered predecessors. The footprint remains compact. At the same time, energy consumption has been reduced by an impressive 50%!
Burn-Wet Technology for Safe Waste Gas Treatment
The compact burn-wet combination from DAS Environmental Experts is based on decades of experience in waste gas treatment. Process gases are oxidised, reduced or pyrolysed in a ring-shaped burner, depending on their composition. Subsequent wet scrubbing reliably cools and binds the resulting compounds. This point-of-use technology enables the safe and efficient treatment of industrial waste gases – including those containing fluorine compounds, ammonia, silane or hydrogen – and is used worldwide in the semiconductor industry.
Optimise Your Waste Gas Treatment with STYRAX
Rely on efficient burn-wet or plasma-wet technology for maximum DRE for e.g. CF4, SF6 or NF3 and low water consumption.
STYRAX – Technical Data and Configuration Options
STYRAX (burn-wet)
Hazardous substances of process waste gases are treated directly from where they originate (Point-of-Use). In this optimized burn-wet technology the gases are burnt from top to bottom. Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis). A fluid wall/film prevents corrosion and deposition of particles in the reactor.
In the washing column next to the reactor, soluble components are absorbed and particles suspended. The scrubbing liquid cools down and neutralises combustion products such as hydrogen halides. With the application of STYRAX within a holistic abatement concepts, manufacturers in the high-tech industry will meet the strict standards of the German air pollution law (TA Luft).
