Advanced Waste Gas Treatment for Semiconductor Manufacturing
Our Waste Gas Treatment Portfolio at a Glance
Concepts for Waste Gas Treatment
Since 1991 DAS Environmental Experts has developed and produced client-specific point-of-use facilities for waste gas treatment in the global high-tech industries. This is how we support the technological development of our society and, at the same time, protect people and the environment. The treatment of industrial waste gases serves the protection of people and the environment as well as the stability of the production process. DAS Environmental Experts has dedicated itself to this task more than 35 years ago. Our abatement concepts are always customized and manufactured according to high industrial standards in Germany.
Portfolio Waste Gas Treatment
Welcome to the heart of innovation in waste gas treatment! At DAS Environmental Experts, we take immense pride in offering a comprehensive product portfolio designed to revolutionize how industries manage their waste gas emissions. Our dedication to environmental sustainability is evident in our diverse range of treatment processes, which include Burn-Wet and Plasma-Wet Systems, Wet Systems, Burn-Dry Systems, Catalytic Systems, and Particle Separator technologies.
Solutions & Products
Discover state-of-the-art solutions in our comprehensive product portfolio for waste gas treatment. From customized point-of-use systems to integrated treatment concepts—we have everything your industry needs.
Burn-Wet Systems
This technology enables the safe treatment of waste gases directly at the point of use (POU) and is used in numerous DAS cleaning systems to remove hazardous and harmful substances such as fluorine compounds, ammonia, silane or hydrogen.
Plasma-Wet System
Plasma-wet technology is an innovative exhaust gas cleaning process that is particularly effective in treating persistent pollutants such as PFC gases.
Wet Systems
Wet scrubbing is an efficient process for the treatment of water-soluble pollutants in process exhaust gases. The compact wet scrubbers by DAS Environmental Experts are characterized by a high disposal efficiency and low investment cost.
Catalytic System
Secondary waste gas treatment for maximum reduction of nitrogen oxide emissions following burn-wet and other NOx-generating abatement systems.
Particle Separator — Dust Systems
Particle separation is an essential part of waste gas treatment, preventing pipe blockages and reducing emissions of dust, aerosols and other particulates. Systems from DAS Environmental Experts efficiently clean process waste gases containing micro- and nanoparticles as well as aerosols.
Burn-Dry Sytems (Pyrolysis)
Point-of-Use systems for MOCVD and EUV processes – no wastewater, low fuel gas consumption and high operational reliability.
Do you have any questions about our products?
Our Environmental Experts will be happy to advise you ‒ competently, individually and reliably.
Worldwide Service for Efficient and Safe Waste Gas Treatment
Case Studies
With over 35 years of experience, DAS Environmental Expert GmbH develops technologies for waste gas treatment ‒ burn-wet, pyrolysis or gas scrubber solutions. Each case study shows how innovative technologies from DAS Environmental Experts help to make production processes more environmentally friendly and future-proof.
Press Release
New Plasma-enhanced Catalytic Secondary Abatement Solution Integrates into Exhaust Ducts to Minimize Subfab Floor Space and Energy Demand.
Press Release
The Advanced Mask Technology Center Dresden (AMTC) and DAS Environmental Experts (DAS EE) are intensifying their cooperation on the path to climate-neutral manufacturing.
Press Release
DAS Environmental Expert GmbH reaffirms its leadership in sustainable semiconductor emissions control with independent validation showing that its TILIA abatement system achieves Destruction and Removal Efficiencies (DRE) exceeding 99.9% for CF₄ and other fluorinated greenhouse gases.
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We are happy to be your reliable partner for waste gas treatment.
