ALCEA – Advanced Catalytic Oxidation
Highly efficient, integrated DeNOx solution for post combustion waste gas treatment in the semiconductor industry.
ALCEA
Based on the proven DAS plasma-enhanced catalytic technology, ALCEA is a highly integrated and highly efficient secondary abatement system for use downstream of any NOx-generating waste gas treatment units. The process uses plasma technology to generate Reactive Oxygen Species (ROS), which then serve as the basis for the catalytic reactions.
Dependent on prior treatment steps ALCEA achieves exceptional NOx reduction efficiency of up to 95% with minimal energy consumption. Through the integration of the catalyst unit in the exhaust ducts ALCEA has virtually no footprint. The technical system can be easily fitted into the subfab’s exhaust duct system.
NOx Reduction
Virtually no Footprint
% Retrofit Ready
Advanced NOx Treatment
ALCEA has been specially developed for use as a secondary abatement system downstream of NOx-generating abatement technologies, such as plasma-wet or burn-wet systems. As the Catalyst Unit is integrated into the exhaust duct system, it requires no additional footprint in the subfab. The plasma-enhanced catalyst combines non-thermal plasma (NTP) and catalyst technology to achieve efficient NOx reduction with low energy consumption. Its high treatment capacity and compact design enable easy integration into existing exhaust systems without affecting the operation or performance of upstream abatement equipment.
Optimize Your Waste Gas Treatment with ALCEA
Highly integrated and highly efficient secondary abatement system for NOx treatment.
