TILIA – Dual Reactor System with Internal Redundancy
TILIA is a Burn-Wet System for advanced Etch and CVD applications in the semiconductor industry.
Waste Gas Treatment – TILIA
Disposal of pyrophoric, fluorinated, toxic or long-lived environmentally harmful gases and reaction products
Why TILIA
TILIA is a system for the disposal of pyrophoric, fluorinated, toxic or long-lived environmentally harmful gases and reaction products which are used in chemical and physical processes in the semiconductor and solar industry or are generated by the process. Disposal takes place via combustion and subsequent treatment in a scrubber, where particles are separated and soluble gas components are abated using a scrubbing liquid. TILIA offers outstanding efficiency in terms of footprint to throughput ratio. Operating costs can be optimised through the additional integration of a process tool interface.
TILIA DUO
TILIA DUO contains two independent units, each consisting of one combustion reactor and one scrubber with an integrated demister located above it. Each unit also has its own power supply. TILIA DUO is available in the variants TILIA DUO 2+2, TILIA DUO 4+4 and TILIA DUO 6+6. Each unit has 2, 4 or 6 waste gas inlets as well as 2, 4 or 6 additional inlets, which are connected to the other unit via back-up lines. If necessary, the waste gas at the inlets of one of the two units can be diverted to the other unit. As a result, the system has internal redundancy and thus very high availability.
TILIA — for Advanced Etch and CVD Applications
TILIA DUO is designed to efficiently handle the increasing process gas flows and can therefore replace several conventional exhaust gas cleaning systems.
Advantages
- Burn-/Wet System (Scrubber) with liquid recirculation
- Serves up to 8 or 12 process chambers with up to 2400 slm total flow depending on process
- Best in class capacity per footprint with cost effective integrated backup
- Reactor capacity up to 1200 slm inert gas (per reactor) depending on process
- Implementation of safety requirements of new processes with higher number of process modules, larger process gas flows and higher total flows
Application
- CVD
- Etch (Metall, Poly, Oxides, etc.)
- Epitaxy
- GaN
- MOCVD
- LED
TILIA DUO 4+4
TILIA DUO 6+6
Functioning principle of the TILIA DUO
Combustion Reactor
The waste gas is fed into the combustion reactor and burned there with the help of fuel gas (natural gas, propane, hydrogen) and an oxidant (oxygen). Due to its design, the waste gas flows through the combustion reactor from top to bottom. The chemical bonds are broken by the high temperatures in the reactor and are oxidized to form chemically stable compounds which are then treated by the following scrubber.
Scrubber
The combusted waste gas flows through the scrubber according to the counter flow principle. There are several spray nozzles and a demister in the scrubber. Scrubbing liquid is sprayed into the gas stream through the spray nozzles. During washing, particles are suspended in the scrubbing liquid and acidic components are neutralised by a basic scrubbing liquid.
Scrubbing Liquid Tank and Recirculation loop
A scrubbing liquid tank is located below the burner and scrubber and serves as a collection tank for the scrubbing liquid. The liquid used is water, to which lye can be added, depending on the process. The scrubbing liquid is circulated in a recirculation loop and absorbs soluble gas components. A cooling water based heat exchanger ensures that the system does not overheat.
Demister
In the demister, the water droplets are separated. The separated water enters the scrubbing liquid tank.
Technical Data
| TILIA DUO 4+4 | TILIA DUO 6+6 | |
|---|---|---|
| Pumping capacity: | 3000 slm (8 inlets) | 3000 slm (12 inlets) |
| Burner output (adjustable): | 2 x 100 kW | 2 x 100 kW |
| Inlets: | 8 x DN40 with internal redundancy | 12 x DN40 with internal redundancy |
| Service life: | > 99.9% | > 99.9% |
Consulting and Technology Selection
The selection of the appropriate technology is carried out by our application specialists after analyzing the situation on site. Information about the process tool, vacuum pump, gas types and flows as well as the available operating materials are decisive.
In order to ensure a long-term runtime and tool availability, our service and technical support are available on demand or on-site as soon as the system is commissioned.
Dr. Christian Kuhne
Director Sales Global