UPTIMUM - Efficient Waste Gas Treatment of CVD Processes
UPTIMUM is part of the burn-wet technology portfolio of DAS Environmental Experts. The system is specifically designed to meet a higher uptime demand in specific CVD processes.
UPTIMUM – Powerful Solutions at the Point of Use
All UPTIMUM systems have a small footprint with service and maintenance access from the front and back. Installation is quick and easy and does not require specialised equipment. Operation costs and general safety can be optimised with a process tool interface.
Efficient treatment of industrial processes with UPTIMUM
UPTIMUM is optimised for up to six independent gas inlets from CVD processes in a wide range of industrial sectors. Various fuel gases and washing liquids can be used. UPTIMUM PLUS is specially adapted to the requirements of thin-film silicon photovoltaic processes. This variant can dispose of higher quantities of H2 and NF3 (or F2) without compromising system availability.
Burn-Wet Technology for Safe Waste Gas Treatment
The compact burn-wet combination from DAS Environmental Experts is based on decades of experience in waste gas treatment. Process gases are oxidised, reduced or pyrolysed in a ring-shaped burner, depending on their composition. Subsequent wet scrubbing reliably cools and binds the resulting compounds. This point-of-use technology enables the safe and efficient treatment of industrial waste gases – including those containing fluorine compounds, ammonia, silane or hydrogen – and is used worldwide in the semiconductor industry.
Optimise Your Waste Gas Treatment with UPTIMUM
UPTIMIUM is designed for broad applicability across a wide range of CVD processes in various industries.
UPTIMUM – Technical Data and Configuration Options
UPTIMUM (burn-wet)
Process waste gases are induced through a maximum of six separate inlets. Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis). A fluid wall/film prevents corrosion and deposition of particles in the reactor. In the washing column next to the reactor, soluble components are absorbed and particles suspended. The scrubbing liquid cools down and neutralises combustion products such as hydrogen halides. With the application of UPTIMUM within a holistic abatement concepts, manufacturers in the high-tech industry will meet the strict standards of the German air pollution law (TA Luft).
