Point-of-Use Waste Gas Treatment with AQUABATE (wet)

The well proven solution AQUABATE is a pure wet scrubber technology for flexible and customized abatement of water-soluble harmful substances from process waste gases at the point of use. Typical gases are hydrogen chloride, chlorosilane, ammonia and decomposition products from etching processes.

Waste Gas Treatment – AQUABATE

Treatment of Waste Gases with AQUABATE

Maintenance of AQUABATE wet scrubbers is quick and easy with access for operation and maintenance on the front and back sides. The cost-effective system requires only small space. Operation costs and general safety can be optimized with a process tool interface.  

Operating Principle of the AQUABATE Wet Scrubber

The waste gases of the process tool are introduced into the scrubber through up to four separate connections, specifically designed to prevent blockages. Subsequently, the gas stream is purified according to a co-current or countercurrent principle by a packed-bed or spray washer. The removal of water-soluble components from the gas stream is achieved by physical absorption in water. To increase washing efficiency the scrubbing liquid can be enhanced optionally with chemicals. The system can be designed as a one- or two-stage scrubber. After the last absorption step, entrained washing liquid drops are removed from the clean gas flow by a demister. The system is controlled automatically by a programmable logic controller and meets the safety requirements of the SEMI S2.

AQUABATE FLEX – Modular Waste Gas Treatment

AQUABATE FLEX is a modular wet scrubber for efficient treatment of water-soluble components from waste gases of different applications. The gas inlets are specifically designed to prevent blockages. AQUABATE FLEX is available as one- or two-stage scrubber. Based on the compact and modular design, the wet scrubber will be optimized to customer requirements. Depending on the configuration of the scrubber the gas inlets can be optionally heated up to the scrubber stage or the washing liquid tank in order to avoid problems caused by condensing gas in the waste gas supply. To increase washing efficiency the scrubbing liquid can be enhanced optionally with chemicals.

Specifications

  • Available in 6 Variations
  • No inlet clogging
  • Small Footprint

Technical Data

  • Dimensions (W x D x H): 1165 mm x 820 mm x 1944 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 4 x DN40 – DN150
  • Gas outlet: 2 x DN100 or DN150 (application-specific)

Further AQUABATE Products

AQUABATE EPI

AQUABATE EPI was specifically designed to treat waste gases of epitaxy processes in the semiconductor industry. The scrubber meets the high safety standards that are necessary when using hydrogen as a process carrier gas. After the scrubbing process, the hydrogen is safely diluted to its lower explosion limit. The waste gases are introduced through up to three separate connections, specifically designed to prevent blockages. Both inlets and feed lines have an optional heating system.

Technical Data

  • Dimensions (W x D x H): 1020 mm x 930 mm x 1800 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 3 x DN40
  • Gas outlet: DN40

AQUABATE COMBIBURN

AQUABATE COMBIBURN is a combination of AQUABATE EPI and ESCAPE PLUS technology and is a solution specifically developed to treat waste gases from epitaxy processes. Gas scrubbing takes place in three steps (sample process): The AQUABATE EPI gas scrubber absorbs silicon chloride and HCI. SiH4, GeH4 und H2 combust in the ESCAPE PLUS burner apparatus. In ESCAPE PLUS’ subsequent scrubbing process SiO2 and GeO2 are absorbed. All process waste gases, including hydrogen, are completely abated.

Technical Data

  • Dimensions (W x D x H): 1875 mm x 930 mm x 2070 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 3 x DN40
  • Gas outlet: DN100

Options

The following equipment options are available for all AQUABATE wet scrubber systems:

  • Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz
  • Heated feed lines and inlets
  • Process-Tool-Interface
  • Signal Tower
  • Drip Pan
  • Earthquake Safety Kit
  • Monitoring
  • SEMI S2 certification

Certificates