DAS Environmental Expert Systems Reliably Treat Waste Gases from MEMS-Production

The manufacturing of MEMS utilizes processes typical to the semiconductor industry. Microsystems on one chip, for example, employ the common technologies of microelectronics plus some additional, specialized process steps. Since the 1990s, when it was founded, DAS Environmental Expert develops, manufactures and installs customer-specific waste gas abatement technology for the semiconductor industry. On customer demand, we also provide system servicing and maintenance.

Of the varied options to deposit thin films from reactive sputtering, ALD (Atomic Layer Deposition) and (CVD/PECVD (Chemical Vapor Deposition/Plasma-Enhanced Chemical Vapor Deposition) to diverse technologies for etching and structuring and wafer cleaning, we offer the suitable waste gas treatment solution for all process steps. Our technology is a flexible, integrated system concept. Based on creating a small footprint, our system usually fits inside a cabinet and requires less than one square meter (10.8 square feet) of footprint.

Thus, the abatement of hazardous gases and gaseous mixtures happens safely and reliably directly at the Point-of-Use. Harmful substances are removed through burner/wet systems with separate burner and wet (scrubbers) and the aid of electrostatic filters. The residual gas can promptly be released into the environment through an exhaust system. The exhausts from our systems meet all regulatory requirements.

Our portfolio lists abatement technologies for all processes employed in MEMS manufacturing. Our systems operate fully automatically and are sensor-controlled. They meet the highest safety standards as documented by our numerous relevant certifications.