The Road to a Zero-Emission Sub-Fab

Explore how the semiconductor industry can move toward truly zero‑emission sub‑fabs with highly efficient abatement systems, renewable energy, advanced technologies for reuse and recycling, and multi‑stage emissions control — enabling sustainable, carbon‑neutral operations.

A vast field of green rolling hills is dotted with numerous white wind turbines under a sky with scattered clouds, showcasing sustainable energy and renewable power resources.

Carbon Neutral Commitments

What does the Sub-Fab have to do to become carbon neutral?

Is this the right question?

What does the Sub-Fab need to do to become emission free?

Dr. Guy Davies present the DAS view on ESG from a Sub-Fab perspective.

What has to happen?

For an emissions free Sub-Fab today

Highly efficient abatement systems
Renewable energy
Extra stages of abatement necessary for all emissions

For an emissions free Sub-Fab tomorrow

Alternative fuels
Alternative technologies focused on reuse and recycle
Integrated 2nd stage abatement

Effective Digitalisation strategy in the Sub-Fab with open interfaces

Get equipment talking to each other

Industry Sub-Fab leadership need to be addressed

What are Industry Best Practices and understanding of the trade offs in the Sub-Fab?

Consulting and Technology Selection

The selection of the appropriate technology is carried out by our application specialists after analyzing the situation on site. Information about the process tool, vacuum pump, gas types and flows as well as the available operating materials are decisive.

In order to ensure a long-term runtime and tool availability, our service and technical support are available on demand or on-site as soon as the system is commissioned.

Dr. Guy Davies

+49 351 40494-000 gas-treatment@das-ee.com

Contact now