DALEA – Point-of-Use Fine Dust Abatement

The integrated rotating fine dust collector reduces emissions of fine dust particles by up to 98%. DALEA has proven itself especially effective in separating tungsten dust from WF6 processes. With a high capacity of up to 390 m³/h and its compact design, the DALEA is ideal for new and existing fabs. The DALEA can be connected behind most dust-emitting equipment. In addition, the rotor works as a fan and moves the waste gas forward. This prevents any loss of pressure and even supports the exhaust system. Access for operation and maintenance is from the front and back.