EDC - Point of Use Waste Gas Treatment of ultrafine particles
EDC stands for “Electrostatic Dust Collector”. This system is perfectly suited for treating process waste gases containing micro- and nanoparticles or aerosols, such as those produced in the photovoltaic, LED, and semiconductor industries.

EDC PLUS - Reduction of Micro and Nanoparticle Emissions
EDC PLUS is an electrostatic dust collector for point-of-use treatment of micro- and nanoparticle-containing or aerosol-containing process waste gases up to 270 m³/h. The system is designed for applications in the semiconductor industry, as for example for the treatment of particulate emissions generated during the use of arsine (AsH₃) and phosphine (PH₃) in LED manufacturing.

Efficient treatment of industrial processes with EDC PLUS
The dust collector reduces particle emissions of even the finest particles up to 99.9 % and successfully prevents exhaust blockage. It can be used downstream of most particle generating abatement devices. Access for operating and maintenance is possible from the front and back.
Optimise Your Waste Gas Treatment with EDC PLUS
Optimised for processes with particularly high levels of particles and aerosols in the photovoltaic, LED, TFT/LCD and semiconductor industries
