TILIA – Dual System with Internal Redundancy (Burn-Wet)
TILIA DUO is designed to efficiently handle the increasing process gas flows and can therefore replace several conventional waste gas cleaning systems.
TILIA – Waste Gas Treatment for Advanced Etch and CVD Applications in the Semiconductor Industry
TILIA is a system for the disposal of pyrophoric, fluorinated, toxic or long-lived environmentally harmful gases and reaction products which are used in chemical and physical processes in the semiconductor and solar industry or are generated by the process. Disposal takes place via combustion and subsequent treatment in a scrubber, where particles are separated and soluble gas components are abated using a scrubbing liquid. TILIA offers outstanding efficiency in terms of footprint to throughput ratio. Operating costs can be optimised through the additional integration of a process tool interface.
Efficient Treatment of Industrial Processes with TILIA
TILIA DUO
TILIA DUO consists of two independent burn-wet units, each equipped with its own power supply. This configuration enables reliable and efficient treatment of industrial waste gas streams from multiple process tools.
The system is available in the variants TILIA DUO 2+2, TILIA DUO 4+4 and TILIA DUO 6+6. It is designed to achieve higher wafer throughput per abatement footprint and to meet the growing complexity of modern semiconductor manufacturing equipment, in particular advanced Etch and CVD mainframes.
Best-in-Class Abatement System: TILIA Exceeds SEMI SCC Greenhouse Gas Benchmarks
DAS Environmental Expert GmbH reaffirms its leadership in sustainable semiconductor emissions control with independent validation showing that its TILIA abatement system achieves Destruction and Removal Efficiencies (DRE) exceeding 99.9% for CF₄ and other fluorinated greenhouse gases. This performance surpasses the targets defined in the 2024 SEMI SCC Whitepaper “Overview of F‑GHG and Nitrous Oxide Semiconductor Abatement Technologies,” which sets new industry benchmarks at a minimum DRE of >95% and an aspirational goal of >99%. TILIA proves that even higher efficiencies are not only technically feasible but deliver tangible sustainability and economic advantages.
Burn-Wet Technology for Safe Waste Gas Treatment
The burn-wet combination from DAS Environmental Experts is based on decades of experience in waste gas treatment. Process gases are oxidised, reduced or pyrolysed in a reactor with a burner, depending on their composition. Subsequent wet scrubbing reliably cools and binds the resulting compounds. This point-of-use technology enables the safe and efficient treatment of industrial waste gases – including those containing fluorine compounds, ammonia, silane or hydrogen – and is used worldwide in the semiconductor industry.
Optimise Your Waste Gas Treatment with TILIA
Efficient treatment of pyrophoric, fluorinated, toxic or long-lived environmentally harmful gases and reaction products.
