Waste Gas Treatment Systems for High-Tech Manufacturing
Since 1991 DAS Environmental Experts has developed and produced client-specific point-of-use facilities for waste gas treatment in the global high-tech industries. In principle, DAS scrubbers treat condensable, flammable, corrosive, reactive, toxic and/or pyrophoric gases (e. g. silanes, silane organics, terpineols, hydrogen, ammonia or hydrogen halides) and fine dust.
Process- and Product Portfolio for Waste Gas Treatment at Point-of-Use
Our clients in the semiconductor/MEMS, photovoltaic, flat panel and LED industries profit from our extensive technical expertise of our team in Dresden and worldwide. Our detailed knowledge of the manufacturing processes of our customers means that we know that waste gas is essential for the safety of the manufacturing processes. We use this expertise to offer custom fit and effective solutions for our customers. We develop and produce point-of-use scrubbers for waste gas flows up to 5,000 m³/h for a wide variety of industries.
If required, we also offer integrated waste gas treatment concepts including vacuum pumps of your choice in our system or other components such as dry bed solutions. We also provide smart combinations of our different technologies to a complete system to perfectly fit your process requirements. Our product portfolio for point-of-use waste gas treatment includes four technology groups.
Burn-Wet Systems
The compact combination of burner and scrubber is based on the expertise we have continuously developed since DAS EE was founded. Waste gases are fed into a ring-shaped burner in which various reactions such as oxidation, reduction or pyrolysis take place, depending on the chemical composition. A suitable scrubbing liquid then absorbs and cools the resulting soluble, gaseous and solid compounds. This technology enables the safe treatment of waste gases directly at the point of use (POU) and is used in numerous DAS cleaning systems to remove hazardous and harmful substances such as fluorine compounds, ammonia, silane or hydrogen — for example in the semiconductor industry.
Plasma-Wet Systems
Plasma-wet technology is an innovative exhaust gas cleaning process that is particularly effective in treating persistent pollutants such as PFC gases. Plasma-wet systems use direct current to generate a plasma in a nitrogen carrier gas. The core of the process is the transfer of very high energy to the exhaust gas to be cleaned, resulting in its decomposition and thus a highly efficient degradation of the pollutants. The adjustable power output allows the system to be optimally configured for different requirements and pollutant concentrations, making it versatile and efficient.
Wet Systems (Scrubber)
Wet scrubbing is an efficient process for the treatment of water-soluble pollutants in process exhaust gases. Our wet scrubbers are installed mainly in the semiconductor industry, as a Point-of-Use (POU) wet treatment system. Installed closely behind the vacuum pumps, they optimally protect the fab’s exhaust gas system from contamination and corrosion. Maintenance is quick and easy.
Burn-Dry Systems (Pyrolysis)
The process waste gases are broken down in a decomposition zone. If required, a fuel gas can be applied. Depending on the chemical composition of the waste gases, various reactions take place, such as oxidation, reduction or pyrolysis.
The Burner Product Family LARCH was especially designed for MOCVD processes in the LED and GaN industry. It is capable of treating large flows of the typical gases hydrogen and ammonia.
Catalytic Systems
DAS EE’s Catalytic Systems represent an advanced solution for the semiconductor industry, offering superior performance in exhaust aftertreatment by harnessing the power of selective catalytic reduction (SCR) with ammonia for DeNOx and fine dust removal through a highly effective membrane filter. The Catalytic System ensures exceptional reduction efficiency with minimal energy consumption by recovery of more than 80% of the process heat. With the advanced, reliable, and environmentally friendly solution, you can stay ahead of environmental regulations and achieve your sustainability goals.
Particle Separator — Dust Systems
Particle separation is an essential aspect of exhaust gas treatment to prevent clogging of pipes and the release of toxic dusts into the environment. Our systems filter micro- and nanoparticle-containing or aerosol-containing process waste gases. DAS EE uses different separation technologies for this, such as electrostatic filters or centrifugal separators. Our systems are also optimised for low pressure loss and some even generate additional negative pressure during cleaning.
Waste Gas Treatment with Rotary Dust Collector
The systems of the RDC range use centrifugal force to separate fine dust particles. They are based on the purely mechanical rotor-stator principle.
The rotor works as a blower and moves the waste gas forward; this prevents any loss of pressure and even supports the extraction that normally follows.
Consulting and Technology Selection
The selection of the appropriate technology is carried out by our application specialists after analyzing the situation on site. Information about the process tool, vacuum pump, gas types and flows as well as the available operating materials are decisive.
In order to ensure a long-term runtime and tool availability, our service and technical support are available on demand or on-site as soon as the system is commissioned.
Dr. Christian Kuhne
Director Sales Global