Our Portfolio for Point-of-Use Waste Gas Treatment

Our worldwide service teams professionally support all systems installed. Due to our in-house R&D capacities at our Headquarters in Dresden/Germany as well as in the innovation centers in Taiwan and the USA, we cooperate closely with our customers and adopt quickly to new innovation cycles. Our solutions comply with the highest quality and safety standards of the high-tech industry and meet the demanding requirements of the German TA Luft (Technical Instructions on Air Quality Control). All this makes DAS Environmental Experts one of the leading companies in its branch.

For the client, process optimizations very often cause changes in composition and quantity of process waste gases, thus leading to changing requirements regarding the waste gas treatment system. Changing industry standards for system components and modules also require continuous and further development in waste gas treatment systems. 

The manufacture of microchips, solar cells, flat screens, and Light Emitting Diodes (LEDs) requires highly complex, multistage manufacturing processes that produce harmful waste gases. Such process steps can be etching, CVD, epitaxy or TCO. The waste gases need to be treated immediately at the point-of-use for several reasons:

A lot of waste gases contain a lot of particles or dust in the gas flow. This dust has the possibility to disrupt the facility exhaust leading to unintended downtime in the manufacturing plant. What makes the dust difficult to treat is that the particle size is often submicron and easily passes through wet scrubbers or physical filters without being trapped in the scrubbing liquid.

Typically gas treatment tools are situated in the sub fab and placed after the vacuum pumps. The physical closeness to the vacuum pumps results in several advantages, a shorter gas line between the two tools with less chance leaks and a cost saving potential as some processes require this line to be heated to avoid condensation within the waste gas line. The application of waste gas treatment systems furthermore reduces the demand for cleaning and maintenance at the gas lines. Our case studies section will give some examples.