Point-of-Use Waste Gas Treatment with STYRAX
The STYRAX tool family uses burn/wet technology and was specifically developed to manage demanding waste processes like CVD processes as well as in Etch, EPI and LED processes in the semiconductor and photovoltaic industries. In the context of climate change and the increasing need to use renewable energy, STYRAX is also available as a plasma scrubber for the electrical treatment of all types of waste gas. With the same performance!
The media supply of the systems can be carried out variably. Longer maintenance cycles increase the system’s uptime.
Waste Gas Treatment – STYRAX
Treatment of Waste Gases with STYRAX
Why STYRAX
The development of the STYRAX product family bases on two significant aspirations for modern waste gas treatment: Improved PFC abatement and Reduced Maintenance Intervals. The scrubbing stage is optimized for HF. Water and/or lye consumption are minimized. A special inlet design prevents clogging. Further options are available to improve maintenance intervals in other processes.
Operating Principle of STYRAX Waste Gas Treatment Systems
Operation Principle of the STYRAX as a Burn-Wet Abatement
Hazardous substances of process waste gases are treated directly from where they originate (Point-of-Use). In this optimized burn/wet technology the gases are burnt from top to bottom. Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis). A fluid wall/film prevents corrosion and deposition of particles in the reactor.
In the washing column next to the reactor, soluble components are absorbed and particles suspended. The scrubbing liquid cools down and neutralises combustion products such as hydrogen halides. With the application of STYRAX within a holistic abatement concepts, manufacturers in the high-tech industry will meet the strict standards of the German air pollution law (TA Luft).
The Alternative to Fuel Gas — STYRAX Plasma-Wet Abatement
The STYRAX plasma scrubbers set new standards in waste gas treatment by using electrical energy directly and highly efficiently. Thanks to the integration of a powerful DC plasma torch and a 15 kW power supply, optimum energy yield is achieved.
The proven reactor design and washing stage have been retained, making the STYRAX plasma scrubbers just as reliable and easy to maintain as their natural gas-powered predecessors. The footprint remains compact. At the same time, energy consumption has been reduced by an impressive 50%!
STYRAX Advantages
- Highest DRE of CF4, SF6 or NF3 ≥ 99%
- High capacity for CVD gases SiH4, TEOS, H2 etc.
- Pumping speed 1,000 slm
- Low water consumption due to closed design
- Maintenance cycles for CVD processes > 1 month
- SEMI 2 Certification
STYRAX DUO – Waste Gas Treatment with Backup-Function
STYRAX DUO is our standard version. Two scrubbing systems operate simultaneously. The system is optimised for up to four independent inlets of semiconductor and photovoltaic process tools. In case of malfunction or maintenance on one reactor, the other backs up the treatment of all waste gases (internal back-up), which ensures the equipment’s near 100 % operation time. STYRAX DUO runs with different fuel gases and scrubber liquids. Access for operation and maintenance is found in the front and back. It is characterized by low water consumption through a closed-loop design.
Other Products in the Product Familiy – without Back-Up System
STYRAX INLINE is optimised for up to six independent inlets of semiconductor and photovoltaic process tools.
STYRAX TWICE is a double-system with two independent burn/wet systems with a common control and media supply. It is optimised for up to eight independent inlets of semiconductor and photovoltaic process tools.
Technical Data
| STYRAX INLINE | STYRAX TWICE | |
|---|---|---|
| Dimensions（W x D x H： | 1110 mm x 675 mm x 2070 mm | 1865 mm x 675 mm x 2070 mm |
| Maintenance area: | in front of and behind the system | in front of and behind the system |
| Gas entry： | 3 x DN40 + 3 x DN25 | 2 x 4 DN40 |
| Gas outlet： | DN100 | 2 x DN100 |
Options
The following equipment options are available for all STYRAX systems:
- Up to 6 gas inlets
- Fully heated inlet pipes up to 200°C
- Closed-loop system: Water, Lye
- Process-Tool-Interface
- Signal Tower
- Drip Pan
- Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz
- Burn-Wet with fuel gas NG, LPG or hydrogen | alternatively as plasma-wet
- Oxidant: O2, CDA
- Inlet cleaning device (Plunger) to minimize build-up at waste gas inlets
- Flushed liner — Clogging prevention reactor design for Etch processes
- Adaptive Combustion Control — Integrated NOx emission reduction
- Auxiliary fan for negative pressure
- Earthquake Safety Kit
- Monitoring
Consulting and Technology Selection
The selection of the appropriate technology is carried out by our application specialists after analyzing the situation on site. Information about the process tool, vacuum pump, gas types and flows as well as the available operating materials are decisive.
In order to ensure a long-term runtime and tool availability, our service and technical support are available on demand or on-site as soon as the system is commissioned.
Dr. Christian Kuhne
Director Sales Global