The Road to a Zero-Emission Sub-Fab
A World of Trade Offs
Carbon Neutral Commitments
What does the Sub-Fab have to do to become carbon neutral?
Is this the right question?
What does the Sub-Fab need to do to become emission free?
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What has to happen?
For an emissions free Sub-Fab today
- Highly efficient abatement systems
- Renewable energy
- Extra stages of abatement necessary for all emissions
For an emissions free Sub-Fab tomorrow
- Alternative fuels
- Alternative technologies focused on reuse and recycle
- Integrated 2nd stage abatement
Effective Digitalisation strategy in the Sub-Fab with open interfaces
Get equipment talking to each other
Industry Sub-Fab leadership need to be addressed
- What are Industry Best Practices and understanding of the trade offs in the Sub-Fab?
Consulting and Technology Selection
The selection of the appropriate technology is carried out by our application specialists after analyzing the situation on site. Information about the process tool, vacuum pump, gas types and flows as well as the available operating materials are decisive.
In order to ensure a long-term runtime and tool availability, our service and technical support are available on demand or on-site as soon as the system is commissioned.
Dr. Guy Davies
Director Business Development Global