Technology Leadership: Expertise Meets Environmental Technology
Our technology portfolio is designed to address some of the most pressing environmental challenges facing semiconductor, photovoltaic, LED, and other advanced manufacturing industries.
Our technology performance reflects our commitment to innovation
By combining deep process expertise with continuous research and development, we create customized Waste Gas Treatment Systems and that effectively reduce harmful emissions and their climate impact, treat complex industrial wastewater, and support responsible resource management. Our technologies meet demanding quality, safety, and environmental standards while adapting to evolving manufacturing processes.
Beyond Industry Benchmarks: >99.9% DRE for CF4
The semiconductor industry is under increasing pressure to reduce direct greenhouse gas emissions. Tetrafluoromethane (CF₄) is particularly critical due to its high global warming potential and long atmospheric lifetime.
Destruction and removal efficiency (DRE) is therefore a strategic factor. While industry standards range from 95% to 99%, achieving >99.9% DRE reduces residual emissions tenfold, making it an important lever for decarbonization and compliance.
CF₄ is highly stable and requires precisely controlled thermal conditions for efficient decomposition. Optimized burn-wet systems such as TILIA are an established solution.
High-efficiency abatement reduces emissions and long-term costs, turning compliance into a strategic advantage.
Trusted by the Global Semiconductor Industry
Leading semiconductor manufacturers around the world rely on DAS Environmental Experts for advanced waste gas treatment and environmental technologies. Today, DAS systems are installed in approximately every second 200 mm and 300 mm semiconductor fab worldwide, and four of the industry’s five largest manufacturers are among our customers.
This broad installed base reflects decades of technology leadership, operational reliability, and customer trust. Our systems are designed for durable, robust and low-maintenance operation. Our longest-serving system has been in operation for 30 years, demonstrating the long-term performance of our waste gas treatment technologies.
Advancing Sustainability and Net-Zero Manufacturing
Sustainable innovations are a key driver of our companies strategy. We continuously develop technologies that improve greenhouse gas abatement, support water reuse, and enable more resource-efficient production concepts. From highly efficient treatment of fluorinated greenhouse gases to advanced water recycling and wastewater treatment solutions, our technologies help customers reduce their environmental footprint and move closer to their sustainability and net-zero objectives.
Connecting Research and Industrial Practice
DAS Environmental Experts maintains more than 30 research collaborations with universities and research institutes worldwide. Partners include Karlsruhe Institute of Technology, RWTH Aachen, Technical University of Munich, TU Dresden, KTH Royal Institute of Technology, KU Leuven, Ghent University, École Polytechnique Fédérale de Lausanne, several Fraunhofer institutes, the Helmholtz-Zentrum Dresden-Rossendorf, and the Industrial Technology Research Institute (ITRI) Taiwan.
These collaborations connect scientific research with the requirements of industrial applications. They help us identify emerging technological developments and transfer research findings into practical, scalable solutions for waste gas and water treatment. The resulting technologies aim to improve system performance while reducing emissions, energy and water consumption, and overall resource demand over the system lifecycle.
Industry Standards and Collaboration
DAS Environmental Experts is certified according to ISO 9001, ISO 14001 and ISO 45001 and actively participates in leading industry organizations such as SEMI, SCC, IEEE, SESHA, VDI and Silicon Saxony (founding member). A high customer satisfaction rating of 96% for our Service and Tech Support further demonstrate the trust placed in our technologies, services, and long-term partnerships.
Creating Sustainable Value for Future Industries
For DAS Environmental Experts, technological leadership means developing solutions that protect people, preserve natural resources, and support the continued advancement of high-tech industries worldwide. To receive more information please contact our Environmental Experts.
